Characterizing Thin Films in the Flat Panel Display Industry with Variable Angle Spectroscopic Ellipsometry (VASE®)

James N. Hilfiker; Ron A. Synowicki; Jeffrey S. Hale; Corey Bungay

doi:10.1889/1.1833800

Characterizing Thin Films in the Flat Panel Display Industry with Variable Angle Spectroscopic Ellipsometry (VASE®)

SID Symposium Digest of Technical Papers ◽

10.1889/1.1833800 ◽

1998 ◽

Vol 29 (1) ◽

pp. 491

Author(s):

James N. Hilfiker ◽

Ron A. Synowicki ◽

Jeffrey S. Hale ◽

Corey Bungay

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Flat Panel Display ◽

Flat Panel ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical Properties of GaN Thin Films on Sapphire Substrates Characterized by Variable-Angle Spectroscopic Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l1105 ◽

1998 ◽

Vol 37 (Part 2, No. 10A) ◽

pp. L1105-L1108 ◽

Cited By ~ 28

Author(s):

Tao Yang ◽

Shigeo Goto ◽

Masahiko Kawata ◽

Kenji Uchida ◽

Atsuko Niwa ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Spectroscopic Ellipsometry ◽

Sapphire Substrates ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Anisotropic optical constants of electroluminescent conjugated polymer thin films determined by variable-angle spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.2778744 ◽

2007 ◽

Vol 102 (6) ◽

pp. 063505 ◽

Cited By ~ 25

Author(s):

Jessica M. Winfield ◽

Carrie L. Donley ◽

Ji-Seon Kim

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Conjugated Polymer ◽

Optical Constants ◽

Polymer Thin Films ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization by variable angle spectroscopic ellipsometry of nitrogen-doped Mg Zn1−O thin films prepared by the plasma-assisted reactive evaporation method

Thin Solid Films ◽

10.1016/j.tsf.2014.02.091 ◽

2014 ◽

Vol 571 ◽

pp. 615-619 ◽

Cited By ~ 3

Author(s):

Takami Abe ◽

Akira Nakagawa ◽

Michiko Nakagawa ◽

Tetsuya Chiba ◽

Shuzo Takahashi ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Evaporation Method ◽

Nitrogen Doped ◽

Reactive Evaporation ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of polycrystalline ZnSe1−xTex thin films using variable angle spectroscopic ellipsometry and spectrophotmetery techniques

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.06.048 ◽

2015 ◽

Vol 39 ◽

pp. 735-741 ◽

Cited By ~ 10

Author(s):

E.R. Shaaban ◽

M. El-Hagary ◽

M. Emam-Ismail ◽

A.M. Abd Elnaeim ◽

S.H. Moustafa ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Investigation of HfO2 Thin Films on Si by X-ray Photoelectron Spectroscopy, Rutherford Backscattering, Grazing Incidence X-ray Diffraction and Variable Angle Spectroscopic Ellipsometry

Crystals ◽

10.3390/cryst8060248 ◽

2018 ◽

Vol 8 (6) ◽

pp. 248 ◽

Cited By ~ 11

Author(s):

Xuguang Luo ◽

Yao Li ◽

Hong Yang ◽

Yuanlan Liang ◽

Kaiyan He ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Photoelectron Spectroscopy ◽

Grazing Incidence ◽

Rutherford Backscattering ◽

X Ray Diffraction ◽

X Ray ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Surface topography and optical properties of Ge-Sb(As)-S-Te thin films by atomic-force microscopy and variable angle spectroscopic ellipsometry

Journal of Physics Conference Series ◽

10.1088/1742-6596/356/1/012019 ◽

2012 ◽

Vol 356 ◽

pp. 012019 ◽

Cited By ~ 2

Author(s):

N Dulgheru (Nedelcu) ◽

M Anastasescu ◽

M Nicolescu ◽

M Stoica ◽

M Gartner ◽

...

Keyword(s):

Thin Films ◽

Atomic Force Microscopy ◽

Optical Properties ◽

Surface Topography ◽

Spectroscopic Ellipsometry ◽

Force Microscopy ◽

Atomic Force ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

Journal of Optics ◽

10.1088/2040-8978/13/8/085705 ◽

2011 ◽

Vol 13 (8) ◽

pp. 085705 ◽

Cited By ~ 31

Author(s):

D Nečas ◽

I Ohlídal ◽

D Franta

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical dispersion analysis of TiO2 thin films based on variable-angle spectroscopic ellipsometry measurements

Materials Science and Engineering B ◽

10.1016/s0921-5107(99)00335-9 ◽

1999 ◽

Vol 68 (1) ◽

pp. 42-47 ◽

Cited By ~ 114

Author(s):

Diana Mardare ◽

Peter Hones

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Dispersion Analysis ◽

Tio2 Thin Films ◽

Optical Dispersion ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical characterization of ferroelectric PZT thin films by variable angle spectroscopic ellipsometry

10.1117/12.2064658 ◽

2014 ◽

Author(s):

Md. Shafiqur Rahman ◽

Carlos D. Garcia ◽

Amar Bhalla ◽

Ruyan Guo

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Pzt Thin Films ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry

Surface and Interface Analysis ◽

10.1002/sia.740180211 ◽

1992 ◽

Vol 18 (2) ◽

pp. 124-128 ◽

Cited By ~ 6

Author(s):

Yi-Ming Xiong ◽

Paul G. Snyder ◽

John A. Woollam ◽

G. A. Al-Jumaily ◽

F. J. Gagliardi ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Optical Characterization ◽

Silicon Oxynitride ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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