scholarly journals Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

2015 ◽  
Author(s):  
Gwendolyn Eve Hummel
Keyword(s):  
Aluminum Nitride ◽  
Radio Frequency ◽  
Phase Change ◽  
Phase Change Materials ◽  
Monolithic Integration ◽  
Mems Resonators ◽  
Reconfigurable Radio ◽  
Contour Mode ◽  
Radio Frequency Systems

MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters

2016 ◽  
Vol 26 (10) ◽  
pp. 104001 ◽  
Author(s):  
Christopher D Nordquist ◽  
Darren W Branch ◽  
Tammy Pluym ◽  
Sukwon Choi ◽  
Janet H Nguyen ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Radio Frequency ◽  
Radio Frequency Filters ◽  
Reconfigurable Radio ◽  
Contour Mode

scholarly journals Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

2006 ◽  
Vol 15 (6) ◽  
pp. 1406-1418 ◽  
Author(s):  
Gianluca Piazza ◽  
Philip J. Stephanou ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators ◽  
Contour Mode
Sign in / Sign up

Export Citation Format

Share Document