Phase change material programmable vias for switching and reconfiguration of Aluminum Nitride piezoelectric MEMS resonators

Author(s):  
Gwendolyn Hummel ◽  
Yu Hui ◽  
Matteo Rinaldi
2018 ◽  
Vol 49 (6) ◽  
pp. 509-528 ◽  
Author(s):  
Orawan Aumporn ◽  
Belkacem Zeghmati ◽  
Xavier Chesneau ◽  
Serm Janjai

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