Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Gianluca Piazza; Philip J. Stephanou; Albert P. Pisano

doi:10.1109/jmems.2006.886012

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2006.886012 ◽

2006 ◽

Vol 15 (6) ◽

pp. 1406-1418 ◽

Cited By ~ 393

Author(s):

Gianluca Piazza ◽

Philip J. Stephanou ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Contour Mode

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Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

10.17760/d20194504 ◽

2015 ◽

Author(s):

Gwendolyn Eve Hummel

Keyword(s):

Aluminum Nitride ◽

Radio Frequency ◽

Phase Change ◽

Phase Change Materials ◽

Monolithic Integration ◽

Mems Resonators ◽

Reconfigurable Radio ◽

Contour Mode ◽

Radio Frequency Systems

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Damping in aluminum nitride contour mode MEMS resonators

2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS) ◽

10.1109/mwscas.2017.8052857 ◽

2017 ◽

Cited By ~ 1

Author(s):

Jeronimo Segovia-Fernandez

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Contour Mode

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Contour-Mode Aluminum Nitride Piezoelectric MEMS Resonators and Filters

Integrated Circuits and Systems - MEMS-based Circuits and Systems for Wireless Communication ◽

10.1007/978-1-4419-8798-3_2 ◽

2012 ◽

pp. 29-54 ◽

Cited By ~ 4

Author(s):

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Piezoelectric Mems ◽

Contour Mode

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Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators

IEEE Electron Device Letters ◽

10.1109/led.2012.2188491 ◽

2012 ◽

Vol 33 (5) ◽

pp. 724-726 ◽

Cited By ~ 18

Author(s):

Augusto Tazzoli ◽

Matteo Rinaldi ◽

Gianluca Piazza

Keyword(s):

Experimental Investigation ◽

Aluminum Nitride ◽

Thermally Induced ◽

Mems Resonators ◽

Contour Mode

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Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

Microsystem Technologies ◽

10.1007/s00542-015-2678-1 ◽

2015 ◽

Vol 22 (4) ◽

pp. 791-800 ◽

Cited By ~ 6

Author(s):

Thi Dep Ha ◽

JingFu Bao

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Phononic Crystal ◽

Mems Resonators ◽

Contour Mode ◽

Anchor Loss

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Ovenized high frequency oscillators based on aluminum nitride contour-mode MEMS resonators

2011 International Electron Devices Meeting ◽

10.1109/iedm.2011.6131589 ◽

2011 ◽

Cited By ~ 21

Author(s):

Augusto Tazzoli ◽

Matteo Rinaldi ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

High Frequency ◽

Mems Resonators ◽

Contour Mode

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Heterogeneously Integrated Aluminum Nitride MEMS Resonators and Filters

3D and Circuit Integration of MEMS ◽

10.1002/9783527823239.ch7 ◽

2021 ◽

pp. 113-130

Author(s):

Enes Calayir ◽

Srinivas Merugu ◽

Jaewung Lee ◽

Navab Singh ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Mems Resonators

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One and Two Port Piezoelectric Contour-Mode MEMS Resonators for Frequency Synthesis

2006 European Solid-State Device Research Conference ◽

10.1109/essder.2006.307668 ◽

2006 ◽

Cited By ~ 5

Author(s):

Gianluca Piazza ◽

Philip J. Stephanou ◽

Albert P. Pisano

Keyword(s):

Frequency Synthesis ◽

Mems Resonators ◽

Contour Mode

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Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. ◽

10.1109/memsys.2005.1453857 ◽

2005 ◽

Cited By ~ 28

Author(s):

G. Piazza ◽

P.J. Stephanou ◽

J.M. Porter ◽

M.B.J. Wijesundara ◽

A.P. Pisano

Keyword(s):

Aluminum Nitride ◽

Motional Resistance ◽

Contour Mode

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An Analytical Formulation of the Radio-Frequency Response of Piezoelectric Contour-Mode MEMS Resonators Verified by Measurements

2018 IEEE International Frequency Control Symposium (IFCS) ◽

10.1109/fcs.2018.8597517 ◽

2018 ◽

Author(s):

Johannes Stegner ◽

Sebastian Gropp ◽

Dmitry Podoskin ◽

Uwe Stehr ◽

Martin Hoffmann ◽

...

Keyword(s):

Radio Frequency ◽

Frequency Response ◽

Analytical Formulation ◽

Mems Resonators ◽

Contour Mode

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