SWITCHABLE ALUMINUM NITRIDE MEMS RESONATOR USING PHASE CHANGE MATERIALS
2015 ◽
Keyword(s):
2020 ◽
Vol 204
◽
pp. 112319
◽
2009 ◽
Vol 86
(7-8)
◽
pp. 1196-1200
◽
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2018 ◽
Vol 22
(2-3)
◽
pp. 73-97
2018 ◽