scholarly journals SWITCHABLE ALUMINUM NITRIDE MEMS RESONATOR USING PHASE CHANGE MATERIALS

Author(s):  
G. Hummel ◽  
Y. Hui ◽  
Z. Qian ◽  
M. Rinaldi
Author(s):  
S.S. Kruglov (Jr.) ◽  
◽  
G.L. Patashnikov ◽  
S.S. Kruglov (Sr.) ◽  
◽  
...  

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