Growth Temperature and Properties of Ge4Sb3Te3 Films
Keyword(s):
ABSTRACTThe growth temperature and properties of Ge4Sb3Te3 thin films are presented in this paper. The critical growth temperature of Ge4Sb3Te3 is between 300 and 340 °C. The Ge4Sb3Te3 films can only be grown on a substrate below the critical growth temperature. The typical resistivity and carrier density are in the order of 10-4 Ωcm and 1021 cm-3 for crystalline phase. It has a rock salt crystal structure with a lattice constant of 0.602 nm. Ge4Sb3Te3 has a better thermal stability but a lower crystallization speed than Ge2Sb2Te5.
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1998 ◽
Vol 187
(2)
◽
pp. 234-239
◽
2020 ◽
Vol 116
◽
pp. 105148
Keyword(s):