Comparison between SiO2 Films and Nitridated Oxides in N2O Ambient in Terms of Bulk/Interface Trapping Properties

1994 ◽  
Vol 338 ◽  
Author(s):  
Constantin Papadas ◽  
Patrick Mortini

ABSTRACTThe necessity of employing nitridation process in advanced technologies will be underlined. The different technological alternatives for preparing oxinitride layers will be traced back, followed by a review of the methods currently available for assessing the degradation features of the Si/SiO2 system. Furthermore, comparison between pure SiO2 layers and nitridated films in N2O ambient will be conducted in terms of bulk/interface trapping properties and the obtained physical degradation data will be correlated with classical reliability results. Large emphasis will be given on the trapping properties of tunnel oxides used in non—volatile memory arrays and different technological alternatives will be exploited (i.e. Rapid Thermal Nitridation, Furnace Nitridation). In addition, a similar analysis will be carried out for gate oxides. Finally, some guidelines concerning the optimum selection of the furnace nitridation conditions will be given.

Materials ◽  
2018 ◽  
Vol 12 (1) ◽  
pp. 112 ◽  
Author(s):  
Alex Iglesias ◽  
Zoltan Dombovari ◽  
German Gonzalez ◽  
Jokin Munoa ◽  
Gabor Stepan

Cutting capacity can be seriously limited in heavy duty face milling processes due to self-excited structural vibrations. Special geometry tools and, specifically, variable pitch milling tools have been extensively used in aeronautic applications with the purpose of removing these detrimental chatter vibrations, where high frequency chatter related to slender tools or thin walls limits productivity. However, the application of this technique in heavy duty face milling operations has not been thoroughly explored. In this paper, a method for the definition of the optimum angles between inserts is presented, based on the optimum pitch angle and the stabilizability diagrams. These diagrams are obtained through the brute force (BF) iterative method, which basically consists of an iterative maximization of the stability by using the semidiscretization method. From the observed results, hints for the selection of the optimum pitch pattern and the optimum values of the angles between inserts are presented. A practical application is implemented and the cutting performance when using an optimized variable pitch tool is assessed. It is concluded that with an optimum selection of the pitch, the material removal rate can be improved up to three times. Finally, the existence of two more different stability lobe families related to the saddle-node and flip type stability losses is demonstrated.


2021 ◽  
Author(s):  
K Harshavardhana Reddy ◽  
Sachin Sharma ◽  
B. Madhuri ◽  
K Shivarama Krishna

1993 ◽  
Vol 29 (2) ◽  
pp. 242 ◽  
Author(s):  
C. Papadas ◽  
P. Mortini ◽  
G. Ghibaudo ◽  
G. Pananakakis ◽  
F. Pio ◽  
...  

Author(s):  
Zhiao Zhao ◽  
Yong Zhang ◽  
Guanjun Liu ◽  
Jing Qiu

Sample allocation and selection technology is of great significance in the test plan design of prognostics validation. Considering the existing researches, the importance of prognostics samples of different moments is not considered in the degradation process of a single failure. Normally, prognostics samples are generated under the same time interval mechanism. However, a prognostics system may have low prognostics accuracy because of the small quantity of failure degradation and measurement randomness in the early stage of a failure degradation process. Historical degradation data onto equipment failure modes are collected, and the degradation process model based on the multi-stage Wiener process is established. Based on the multi-stage Wiener process model, we choose four parameters to describe different degradation stages in a degradation process. According to four parameters, the sample selection weight of each degradation stage is calculated and the weight of each degradation stage is used to select prognostics samples. Taking a bearing wear fault of a helicopter transmission device as an example, its degradation process is established and sample selection weights are calculated. According to the sample selection weight of each degradation process, we accomplish the prognostics sample selection of the bearing wear fault. The results show that the prognostics sample selection method proposed in this article has good applicability.


1987 ◽  
Vol 92 ◽  
Author(s):  
Marie E. Burnham ◽  
Ronald N. Legge ◽  
Jaim Nulman Jaim Nulman ◽  
Peter L. Fejes ◽  
James F. Brown

ABSTRACTThe original intent of this study was to compare rapid thermal, thin (80-100Å) gate oxides with standard, furnace-grown, thin gate oxides for endurance. Wafer processing before gate oxide growth was chosen to duplicate processing used ina typical non-volatile memory product. In particular, care was taken to duplipate pre- and post- gate growth processing of field oxide isolated polysilicon capacitors for all wafers in order to eliminate the previous difficulties in comparing oxides when different cleans and processing steps are used.[1] Substrate defects, atypical to this process, were presumably introduced during the initial wafer cleaning and scattered the time-to-breakdown (TTB) values during a constant current stress of these oxides to the point where statistical comparison of TTB averages was dubious. However, for unannealed wafers and for post polysilicon definition heat treatments of 900°C, RTO oxides grown with HCL had the same oxide trapping rate as the furnace oxides grown with TCA and RTO oxides grown in pure O2 had a faster trapping rate. Higher temperature post polysilicon definition heat treatments had different effects. RTO oxides exhibited better yield than the furnace oxides. These results illustrate the differences between RTO and furnace oxidation in the presence of non-ideal wafer substrates.


2021 ◽  
pp. 2813-2823
Author(s):  
Firas A. Hadi ◽  
Zaid F. Makki ◽  
Rafa A. Al-Baldawi

The main objective of this paper is present a novel method to choice a certain wind turbine for a specific site by using normalized power and capacity factor curves. The site matching is based on identifying the optimum turbine rotation speed parameters from turbine performance index (TPI) curve, which is obtained from the higher values of normalized power and capacity factor curves. Wind Turbine Performance Index a new ranking parameter, is defined to optimally match turbines to wind site. The relations (plots) of normalized power, capacity factor, and turbine performance index versus normalized rated wind speed are drawn for a known value of Weibull shape parameter of a site, thus a superior method is used for Weibull parameters estimation which is called Equivalent Energy Method (EEM).


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