Flow Tube Kinetics of Gas-Phase Cvd Reactions

1993 ◽  
Vol 334 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Ir Spectra ◽  
Gas Phase ◽  
Chemical Reactions ◽  
Rate Constant ◽  
Room Temperature ◽  
Flow Tube ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Kinetics Of ◽  
Phase Chemical

AbstractThis paper explores the use of a flow-tube reactor coupled to an FTIR spectrometer to study gas-phase chemical reactions in CVD systems. We show that our apparatus can generate reliable kinetics data by reproducing the literature rate constant for the reaction between O3 and isobutene. We present data from this apparatus on two technologically important systems: TiN from Ti(NMe2)4 (TDMAT) and NH3 and SiO2 from tetraethoxysilane (TEOS) and O3. The results presented include kinetics data for the reaction of Ti(NMe2)4 with NH3 and ND3 at room temperature and the IR spectra of the products from the reaction of TEOS with O3 at 175°C.

IR Diagnostics of MOCVD Reaction Chemistry

1992 ◽  
Vol 282 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Reaction Time ◽  
Gas Phase ◽  
Room Temperature ◽  
Chemical Vapor ◽  
Flow Tube ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Ir Diagnostics ◽  
Trimethyl Aluminum ◽  
Phase Chemical

ABSTRACTThe gas-phase chemical reactions in the Metallorganic Chemical Vapor Deposition (MOCVD) of A1N and TiN have been studied using IR spectroscopy. The products formed from the reaction of trimethyl aluminum (TMA) and NH3 were compared to those from the reaction of TMAwith NF3 using a static gas-phase IR cell. Reaction with NH3 is rapid at 25 °C, and the IR spectrum of the product is consistent with the acid-base adduct (CH3)3Al-NH3. At 25 °C, no reaction between TMA and NF3 was observed. However, at 58 °C a slow reaction occurredto give (CH3)2AlF. The reaction of Ti(N(CH3)2)4 with NH3 was also studied using a flow-tube reactor with a sliding injector port that provides control over the reaction time between two reactive flows. By monitoring the disappearance of Ti(N(CH3)2)4 as a function of NH3 partial pressure and reaction time, we have obtained a preliminary estimate of the rate constant as ∼ 10−16 cm3 molecule−1 s−1 at 25 °C. This result confirms that the reaction is rapid even at room temperature and demonstrates the utility of the flow-tube reactor and FTIR spectrometer for studies of MOCVD chemistry.

Low Temperature CVD of TiN from Ti(NR2)4 and NH3: FTIR Studies of the Gas-Phase Chemical Reactions

1993 ◽  
Vol 335 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Reaction Time ◽  
Gas Phase ◽  
Rate Constant ◽  
Chemical Vapor ◽  
Rate Limiting Step ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Rate Limiting ◽  
Kinetics Of ◽  
Phase Chemical

AbstractThe gas-phase chemical reaction between Ti(NMe2)4 and NH3 is a critical step in the Metallorganic Chemical Vapor Deposition (MOCVD) of TiN at low temperatures. We have examined this reaction using a flow-tube reactor coupled to an FTIR spectrometer. A sliding injector provides control over the reaction time and the kinetics of reactive species can be measured as a function of the partial pressure of an added reagent. The disappearance of Ti(NMe2)4 was measured as a function of reaction time and NH3 pressure at 26°C. The resulting bimolecular rate constant is (1.1±0. 1) x 10-16 cm3molecules−1s−1 Dimethylamine is observed as a direct product from this reaction consistent with other studies. We have also measured the rate constant using ND3 and find a substantial isotope effect, kh/kd ≈2.4± 0.4. This indicates that H-atom transfer is involved in the rate limiting step. We show that these results can be explained by a mechanism comprised of transamination reactions with NH3.

Effect of Donor–Acceptor Interaction on the Kinetics of Gas-phase Chemical Reactions

1993 ◽  
Vol 3 (3) ◽  
pp. 118-120 ◽  
Author(s):  
Galina A. Kapralova ◽  
Tatiana V. Suchkova ◽  
Alexander M. Chaikin
Keyword(s):  
Gas Phase ◽  
Chemical Reactions ◽  
Acceptor Interaction ◽  
Donor Acceptor ◽  
Kinetics Of ◽  
Phase Chemical

Kinetics of Gas-Phase Chemical Reactions and Growth of a-SiC:H Films from Silane and Acetylene in a Remote Hydrogen Plasma Reactor

1991 ◽  
Vol 219 ◽  
Author(s):  
N. M. Johnson ◽  
Paulo V. Santos ◽  
J. Walker ◽  
K. S. Stevens
Keyword(s):  
Silicon Carbide ◽  
Electron Spin Resonance ◽  
Gas Phase ◽  
Chemical Reactions ◽  
Electron Spin ◽  
Plasma Reactor ◽  
Hydrogen Plasma ◽  
Spin Resonance ◽  
Kinetics Of ◽  
Phase Chemical

ABSTRACTGas-phase chemical reactions of interest for the deposition of amorphous silicon carbide in a remote hydrogen plasma reactor have been quantitatively characterized with electron spin resonance, and the deposition of a-SiC:H from silane and acetylene is demonstrated.

scholarly journals Kinetic and mechanistic study on gas phase reactions of ozone with a series ofcis-3-hexenyl esters

RSC Advances ◽  
2018 ◽  
Vol 8 (8) ◽  
pp. 4230-4238 ◽  
Author(s):  
Qilei Zhang ◽  
Xiaoxiao Lin ◽  
Yanbo Gai ◽  
Qiao Ma ◽  
Weixiong Zhao ◽  
...  
Keyword(s):  
Reaction Kinetics ◽  
Gas Phase ◽  
Experimental Methods ◽  
Mechanistic Study ◽  
Gas Phase Reactions ◽  
Flow Tube ◽  
Theoretical Methods ◽  
Tube Reactor ◽  
Kinetics Of

Reaction kinetics of O3with fourcis-3-hexenyl esters were studied using experimental methods in a flow tube reactor as well as using theoretical methods.

scholarly journals Kinetics of 1- and 2-methylallyl + O2 reaction, investigated by photoionisation using synchrotron radiation

2021 ◽  
Author(s):  
Domenik Schleier ◽  
Engelbert Reusch ◽  
Marius Gerlach ◽  
Tobias Preitschopf ◽  
Deb Pratim Mukhopadhyay ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Reaction Kinetics ◽  
Molecular Oxygen ◽  
Light Source ◽  
Storage Ring ◽  
Vacuum Ultraviolet ◽  
Flow Tube ◽  
Tube Reactor ◽  
Swiss Light Source ◽  
Kinetics Of

The reaction kinetics of the isomers of the methylallyl radical with molecular oxygen has been studied in a flow tube reactor at the vacuum ultraviolet (VUV) beamline of the Swiss Light Source storage ring.

Gas phase chemical kinetics of sodium in the upper atmosphere

Nature ◽  
1976 ◽  
Vol 263 (5577) ◽  
pp. 488-490 ◽  
Author(s):  
C. E. KOLB ◽  
J. B. ELGIN
Keyword(s):  
Gas Phase ◽  
Chemical Kinetics ◽  
Upper Atmosphere ◽  
Kinetics Of ◽  
Phase Chemical

Di-imide: Some Physical and Chemical Properties, and the Kinetics and Stoichiometry of the Gas-phase Decomposition

1973 ◽  
Vol 51 (21) ◽  
pp. 3605-3619 ◽  
Author(s):  
C. Willis ◽  
R. A. Back
Keyword(s):  
Gas Phase ◽  
Room Temperature ◽  
Chemical Properties ◽  
Phase Decomposition ◽  
Important Intermediate ◽  
Long Lifetime ◽  
Physical And Chemical ◽  
Text Formation ◽  
Kinetics Of

Preparation of di-imide by passing hydrazine vapor through a microwave discharge yields mixtures with NH3 containing typically about 15% N2H2, estimated from the gases evolved on decomposition. The behavior of the mixture (which melts at −65 °C) on warming from −196 to −30 °C suggests a strong interaction between the components. Measurements of magnetic susceptibility and e.p.r. experiments showed that N2H2 is not strongly paramagnetic, which with other observations points to a singlet rather than a triplet ground-state.Di-imide can be vaporized efficiently, together with NH3, by rapid warming, and the vapor is surprisingly long-lived, with a typical half-life of several minutes at room temperature. The near-u.v. (3200–4400 Å) absorption spectrum of the vapor was photographed; it shows well-defined but diffuse bands, with εmax = 6(± 3) at 3450 Å.Di-imide decomposes at room temperature in two ways:[Formula: see text][Formula: see text]Formation of NH3 was not observed but cannot be ruled out. The decomposition of the vapor is complicated by a sizeable and variable decomposition that occurs rapidly during the vaporization. The stoichiometry of this and the vapor-phase decomposition depends on total pressure and di-imide concentration. The kinetics of the decomposition of the vapor were studied from 22 to 200 °C by following the disappearance of N2H2 by absorption of light at 3450 Å, or the formation of N2H4 by absorption at 2400 Å, and by mass spectrometry. The kinetics are complex and can be either first- or second-order, or mixed, depending on surface conditions. The effect of olefin additives on the decomposition was studied, and is also complex.Mechanisms for the decomposition are discussed, including the possible role of trans-cis isomerization. The relatively long lifetime found for di-imide in the gas phase suggests that it may be an important intermediate in many reactions of hydronitrogen systems.

Sign in / Sign up

Export Citation Format

Share Document