Low Temperature CVD of TiN from Ti(NR2)4 and NH3: FTIR Studies of the Gas-Phase Chemical Reactions

1993 ◽  
Vol 335 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Reaction Time ◽  
Gas Phase ◽  
Rate Constant ◽  
Chemical Vapor ◽  
Rate Limiting Step ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Rate Limiting ◽  
Kinetics Of ◽  
Phase Chemical

AbstractThe gas-phase chemical reaction between Ti(NMe2)4 and NH3 is a critical step in the Metallorganic Chemical Vapor Deposition (MOCVD) of TiN at low temperatures. We have examined this reaction using a flow-tube reactor coupled to an FTIR spectrometer. A sliding injector provides control over the reaction time and the kinetics of reactive species can be measured as a function of the partial pressure of an added reagent. The disappearance of Ti(NMe2)4 was measured as a function of reaction time and NH3 pressure at 26°C. The resulting bimolecular rate constant is (1.1±0. 1) x 10-16 cm3molecules−1s−1 Dimethylamine is observed as a direct product from this reaction consistent with other studies. We have also measured the rate constant using ND3 and find a substantial isotope effect, kh/kd ≈2.4± 0.4. This indicates that H-atom transfer is involved in the rate limiting step. We show that these results can be explained by a mechanism comprised of transamination reactions with NH3.

IR Diagnostics of MOCVD Reaction Chemistry

1992 ◽  
Vol 282 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Reaction Time ◽  
Gas Phase ◽  
Room Temperature ◽  
Chemical Vapor ◽  
Flow Tube ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Ir Diagnostics ◽  
Trimethyl Aluminum ◽  
Phase Chemical

ABSTRACTThe gas-phase chemical reactions in the Metallorganic Chemical Vapor Deposition (MOCVD) of A1N and TiN have been studied using IR spectroscopy. The products formed from the reaction of trimethyl aluminum (TMA) and NH3 were compared to those from the reaction of TMAwith NF3 using a static gas-phase IR cell. Reaction with NH3 is rapid at 25 °C, and the IR spectrum of the product is consistent with the acid-base adduct (CH3)3Al-NH3. At 25 °C, no reaction between TMA and NF3 was observed. However, at 58 °C a slow reaction occurredto give (CH3)2AlF. The reaction of Ti(N(CH3)2)4 with NH3 was also studied using a flow-tube reactor with a sliding injector port that provides control over the reaction time between two reactive flows. By monitoring the disappearance of Ti(N(CH3)2)4 as a function of NH3 partial pressure and reaction time, we have obtained a preliminary estimate of the rate constant as ∼ 10−16 cm3 molecule−1 s−1 at 25 °C. This result confirms that the reaction is rapid even at room temperature and demonstrates the utility of the flow-tube reactor and FTIR spectrometer for studies of MOCVD chemistry.

Flow Tube Kinetics of Gas-Phase Cvd Reactions

1993 ◽  
Vol 334 ◽  
Author(s):  
Bruce H. Weiller
Keyword(s):  
Ir Spectra ◽  
Gas Phase ◽  
Chemical Reactions ◽  
Rate Constant ◽  
Room Temperature ◽  
Flow Tube ◽  
Tube Reactor ◽  
Ftir Spectrometer ◽  
Kinetics Of ◽  
Phase Chemical

AbstractThis paper explores the use of a flow-tube reactor coupled to an FTIR spectrometer to study gas-phase chemical reactions in CVD systems. We show that our apparatus can generate reliable kinetics data by reproducing the literature rate constant for the reaction between O3 and isobutene. We present data from this apparatus on two technologically important systems: TiN from Ti(NMe2)4 (TDMAT) and NH3 and SiO2 from tetraethoxysilane (TEOS) and O3. The results presented include kinetics data for the reaction of Ti(NMe2)4 with NH3 and ND3 at room temperature and the IR spectra of the products from the reaction of TEOS with O3 at 175°C.

Effect of Medium on Acid-Catalyzed Decomposition of N-(Phenylazo)-Substituted Nitrogen Heterocycles

1999 ◽  
Vol 64 (10) ◽  
pp. 1654-1672 ◽  
Author(s):  
Miroslav Ludwig ◽  
Iva Bednářová ◽  
Patrik Pařík
Keyword(s):  
Rate Constant ◽  
Principal Component ◽  
Catalyst Particle ◽  
Pivalic Acid ◽  
Linear Regression Method ◽  
Catalytic Rate Constant ◽  
Rate Limiting Step ◽  
Acid Catalyzed ◽  
Rate Limiting ◽  
Kinetics Of

Four N-(phenylazo)-substituted saturated nitrogen heterocyclics were synthesized and their structure was confirmed by 1H and 13C NMR spectroscopy. The kinetics of their acid-catalyzed decomposition were studied at various concentrations of the catalyst (pivalic acid) in 40, 30, and 20% (v/v) aqueous ethanol at 25 °C. The values obtained for the observed rate constants were processed by the non-linear regression method according to the suggested kinetic models and by the method of principal component analysis (PCA). The interpretation of the results has shown that the acid-catalyzed decomposition of the heterocyclics under the conditions used proceeds by the mechanism of general acid catalysis, the proton being the dominant catalyst particle of the rate-limiting step. The decrease in the observed rate constant at higher concentrations of the catalyst was explained by the formation of a non-reactive complex composed of the undissociated acid and the respective N-(phenylazo)heterocycle. The effect of medium and steric effect of the heterocyclic moiety on the values of catalytic rate constant are discussed.

scholarly journals Reaction of active nitrogen with oxygen

1967 ◽  
Vol 45 (22) ◽  
pp. 2837-2840 ◽  
Author(s):  
A. S. Vlastaras ◽  
C. A. Winkler
Keyword(s):  
Reaction Time ◽  
Oxygen Atom ◽  
Gas Phase ◽  
Rate Constant ◽  
Analytical Method ◽  
Order Rate Constant ◽  
Maximum Amount ◽  
Active Nitrogen ◽  
Tube Reactor ◽  
Different Levels

The maximum yields of oxygen atoms, estimated at different levels in a long-tube reactor by gas-phase "titration" with NO2, were equal for the reactions of active nitrogen with NO and O2. In this reactor, the maximum oxygen-atom production from the oxygen reaction, determined by the amount of N2O3 produced with excess NO2, was found to correspond to the NO "titration" value for the active nitrogen and not to the maximum amount of HCN produced in the active nitrogen – ethylene reaction. A second-order rate constant, [Formula: see text] [Formula: see text]was obtained for the active nitrogen – oxygen reaction.Experiments in a short reactor showed that the validity of the analytical method based on the trapping of N2O3 depended upon adequate reaction time for the NO + NO2 reaction to occur.

The Kinetics of Reactions in and Near the Cytochrome b/f Complex of Chloroplast Thylakoids. I. Proton Deposition

1988 ◽  
Vol 15 (5) ◽  
pp. 695 ◽  
Author(s):  
AB Hope ◽  
J Liggins ◽  
DB Matthews
Keyword(s):  
Rate Constant ◽  
Bimolecular Reaction ◽  
Plastoquinone Pool ◽  
Rate Limiting Step ◽  
Fixed Concentration ◽  
Wide Range ◽  
Entropy Of Activation ◽  
Electron Donation ◽  
Rate Limiting ◽  
Kinetics Of

The kinetics of proton deposition in the intrathylakoid spaces of pea chloroplasts were measured under a wide range of conditions. With duroquinol added to reduce the plastoquinone pool, and 3-(3,4-dichlorophenyl)-1,1-dimethylurea added to inhibit photosystem II, but no ionophore present, the proton deposition, attributed to plastoquinol oxidation, was biphasic. About half the deposition had an apparent rate constant (k) of 150-200 s-1, the other half about 10 s-1. Valinomycin or nonactin (<0.1 �M) plus potassium ions made the deposition almost monophasic, with k = 140 s-1. When the state of reduction of the plastoquinone pool was varied by the addition of varied concentrations of duroquinol, in the presence of 1 �M nonactin, k for proton deposition varied from about 20 (0.01 mM duroquinol) up to a maximum of 140 s-1 (0.5 mM duroquinol). When temperature was varied between 4 and 23°C, with 1 �M nonactin, an Arrhenius plot of ln(k) for proton deposition was linear; the activation enthalpy was 67 kJ mol-1, the entropy of activation, 23 J K-1 mol-1. The data are analysed in terms of a bimolecular reaction between a varying concentration of plastoquinol and a fixed concentration of oxidised Rieske centre. The results are consistent with a rate constant, for the first electron donation by plastoquinol, of 28 s-1 (the rate-limiting step), followed by a relatively fast second electron donation to cytochrome b563 (low potential), followed by deposition of two protons. The speed of the second proton deposition is dependent on the membrane potential difference.

Solvolysis kinetics of ethyl 3-ethoxy-3-iminopropanoate

1986 ◽  
Vol 51 (3) ◽  
pp. 677-683 ◽  
Author(s):  
Jaromír Kaválek ◽  
Josef Panchartek ◽  
Tomáš Potěšil ◽  
Vojeslav Štěrba
Keyword(s):  
Water Molecule ◽  
Rate Constant ◽  
Hydrolysis Rate ◽  
Nucleophilic Attack ◽  
Tetrahedral Intermediate ◽  
Hydrolysis Rate Constant ◽  
Rate Limiting Step ◽  
Limiting Step ◽  
Rate Limiting ◽  
Kinetics Of

Kinetics have been studied of hydrolysis and methanolysis of ethyl 3-ethoxy-3-iminopropanoate. The methanolysis rate constant is lower than the hydrolysis rate constant by about 3 orders of magnitude. The rate-limiting step of the hydrolysis consists in the nucleophilic attack of the protonated substrate by a water molecule, whereas that of the methanolysis consists in the decomposition of tetrahedral intermediate which is several orders of magnitude slower than the decomposition of the intermediate formed in the hydrolysis.

Steric Effects in Acid-Catalyzed Decomposition and Base-Catalyzed Cyclization of 1-(2-Alkoxycarbonylphenyl)-3-phenyltriazenes

1996 ◽  
Vol 61 (5) ◽  
pp. 751-763 ◽  
Author(s):  
Oldřich Pytela ◽  
Aleš Halama
Keyword(s):  
Rate Constant ◽  
Nmr Spectra ◽  
Steric Effects ◽  
Catalytic Rate Constant ◽  
Rate Limiting Step ◽  
Acid Catalyzed ◽  
Catalytic Rate ◽  
Rate Limiting ◽  
Kinetics Of ◽  
Derivatives Of

Eight derivatives of 1-(2-alkoxycarbonylphenyl)-3-phenyltriazene (R = methyl, ethyl, propyl, isopropyl, butyl, isobutyl, hexyl, and allyl) have been synthesized and their UV-VIS, IR, 1H and 13C NMR spectra measured. The NMR spectra have been interpreted in detail. The kinetics of acid-catalyzed decomposition and base-catalyzed cyclization of the title compounds have been measured in 52.1% w/w methanol at 25.0 °C. The unit reaction order has been verified and the cyclization product has been identified. The pH-profiles obtained have been used to calculate the catalytic rate constants kA (acid-catalyzed decomposition) and kB (base-catalyzed cyclization) of all the derivatives; the constants have been interpreted with regard to inductive and steric effects. The catalytic rate constant kA has been found to be independent of the substituents. The catalytic rate constant kB depends statistically significantly upon both inductive and steric effects, the sensitivity to the former being more significant. The experimental results and their interpretation confirm the base-catalyzed cyclization mechanism with formation of tetrahedral intermediate as the rate-limiting step.

Kinetics of cyclization of S-ethoxycarbonylmethylisothiouronium chloride to 2-imino-4-thiazolidone

1979 ◽  
Vol 44 (3) ◽  
pp. 912-917 ◽  
Author(s):  
Vladimír Macháček ◽  
Said A. El-bahai ◽  
Vojeslav Štěrba
Keyword(s):  
Hydrochloric Acid ◽  
Dilute Hydrochloric Acid ◽  
Base Catalysis ◽  
General Base ◽  
Rate Limiting Step ◽  
Limiting Step ◽  
Kinetics Of Formation ◽  
Acid Catalyzed ◽  
Rate Limiting ◽  
Kinetics Of

Kinetics of formation of 2-imino-4-thiazolidone from S-ethoxycarbonylmethylisothiouronium chloride has been studied in aqueous buffers and dilute hydrochloric acid. The reaction is subject to general base catalysis, the β value being 0.65. Its rate limiting step consists in acid-catalyzed splitting off of ethoxide ion from dipolar tetrahedral intermediate. At pH < 2 formation of this intermediate becomes rate-limiting; rate constant of its formation is 2 . 104 s-1.

Kinetics and mechanism of cyclization of N-(2-methoxycarbonylphenyl)-N’-methylsulphonamide to 3-methyl-(1H)-2,1,3-benzothiadiazin-4(3H)-one 2,2-dioxide

1991 ◽  
Vol 56 (8) ◽  
pp. 1701-1710 ◽  
Author(s):  
Jaromír Kaválek ◽  
Vladimír Macháček ◽  
Miloš Sedlák ◽  
Vojeslav Štěrba
Keyword(s):  
Potassium Hydroxide ◽  
Acid Catalysis ◽  
Potassium Hydroxide Solution ◽  
Hydroxide Solution ◽  
General Base ◽  
Rate Limiting Step ◽  
Limiting Step ◽  
Cyclization Kinetics ◽  
Rate Limiting ◽  
Kinetics Of

The cyclization kinetics of N-(2-methylcarbonylphenyl)-N’-methylsulfonamide (IIb) into 3-methyl-(1H)-2,1,3-benzothiadiazin-4(3H)-one 2,2-dioxide (Ib) has been studied in ethanolamine, morpholine, and butylamine buffers and in potassium hydroxide solution. The cyclization is subject to general base and general acid catalysis. The value of the Bronsted coefficient β is about 0.1, which indicates that splitting off of the proton from negatively charged tetrahedral intermediate represents the rate-limiting and thermodynamically favourable step. In the solutions of potassium hydroxide the cyclization of dianion of the starting ester IIb probably becomes the rate-limiting step.

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