Nanometer-Scale Modification and Imaging of Polyimide Films by Scanning Force Microscopy

1991 ◽  
Vol 239 ◽  
Author(s):  
W. N. Unertl ◽  
X. Jin
Keyword(s):  
Scanning Force Microscopy ◽  
Polymer Surfaces ◽  
Degree Of Crystallinity ◽  
Nanometer Scale ◽  
Polyimide Films ◽  
Scanning Force Microscope ◽  
Force Microscopy ◽  
Scanning Force ◽  
Micrometer Size ◽  
The Degree Of Crystallinity

ABSTRACTThe sharp tip of a scanning force microscope can be used to make controlled modifications of polymer surfaces. In this paper, we describe the properties of micrometer size pits up to 900 Å deep formed on Kapton-H surfaces. The structure at the bottom of the pits appears to be closely related to the degree of crystallinity near the surface. We also use elasticity theory to estimate that the resolution of scanning force microscopy for polymer surfaces is about 160 Å for tips with 400 Å radius. This estimate agrees well with the resolution obtained in images of polyimide surfaces.

Contactless Voltage and Current Contrast Imaging with Scanning Force Microscope Based Test Systems

2000 ◽  
Author(s):  
W. Mertin ◽  
S.-W. Bae ◽  
U. Behnke ◽  
R. Weber ◽  
E. Kubalek
Keyword(s):  
Integrated Circuits ◽  
Spatial Resolution ◽  
State Of The Art ◽  
Scanning Force Microscopy ◽  
Scanning Probe ◽  
Contrast Imaging ◽  
Scanning Force Microscope ◽  
Force Microscopy ◽  
Scanning Force ◽  
Electric Signals

Abstract Significant improvements in the performance of modern integrated circuits (ICs) require also an increase of the performance of the used circuit internal test techniques regarding bandwidth, spatial resolution, and sensitivity. Due to its outstanding lateral and vertical spatial resolution in the nanometer regime scanning force microscopy (SFM) based on scanning probe microscopes is well suited for the investigation of very small structures. Furthermore it has been demonstrated that with SFM also electric signals can be contactless tested. This feature can be used for a circuit internal failure analysis of ICs. In this paper principles, examples, and the state-of-the-art of voltage and current measurement based on SFM will be presented.

Nanometer-Scale Surface Modification Using Scanning Force Microscopy in Chemically Active Environments

2004 ◽  
Author(s):  
Lauralice Campos Franceschini Canale ◽  
Ov_´dio Richard Crnkovic ◽  
Paul Chu ◽  
Xiubo Tian ◽  
Jeff De Hosson ◽  
...  
Keyword(s):  
Surface Modification ◽  
Scanning Force Microscopy ◽  
Nanometer Scale ◽  
Force Microscopy ◽  
Scanning Force ◽  
Scale Surface

Scanning force microscopy application to polymer surfaces for novel nanoscale surface characterization

1996 ◽  
Vol 273 (1-2) ◽  
pp. 304-307 ◽  
Author(s):  
Makoto Motomatsu ◽  
Heng-Yong Nie ◽  
Wataru Mizutani ◽  
Hiroshi Tokumoto
Keyword(s):  
Surface Characterization ◽  
Scanning Force Microscopy ◽  
Polymer Surfaces ◽  
Force Microscopy ◽  
Scanning Force

Scanning force microscope Z-calibration using steps on chemically etched mica

1995 ◽  
Vol 53 ◽  
pp. 204-205
Author(s):  
L. Fei ◽  
P. Fraundorf
Keyword(s):  
Lattice Spacing ◽  
Scanning Force Microscopy ◽  
Calibration Standard ◽  
Scanning Force Microscope ◽  
Calibration Standards ◽  
Gold Particles ◽  
Force Microscopy ◽  
Muscovite Mica ◽  
Scanning Force ◽  
Size Variability

Obtaining reliable dimensional information in all three directions is very important in scanning force microscopy (SFM). Calibration standards for SFM should be easy to produce and reliable. For example, mica is often used as a lateral calibration standard, because lattice fringes are relatively easy to obtain. However, reliable height information is hard to get. Pits formed by lithography (180 nm in depth) are used for vertical calibration by some SFM manufacturers.1 These standards have 10variability and are large on the size scale of monolayers. Colloidal gold particles have been proposed as one kind of SFM vertical standard, but the size variability of these particles (e.g. ranging from 5 to 24 nm) makes their use of limited practical value.One solution to the problem is to use chemically etched mica as height calibration standard. Mica has a layered structure, and its c-axis is well denned and weakly bonded. In this study, we used muscovite mica which has c-axis lattice spacing of 10 Å.

Piezoelectric Force Sensing Pb(Zr,Ti)O3 Microcantilever Array for Multiprobe Scanning Force Microscopy

1996 ◽  
Vol 444 ◽  
Author(s):  
T. Itoh ◽  
C. Lee ◽  
J. Chu ◽  
T. Suga
Keyword(s):  
Sol Gel ◽  
Scanning Force Microscopy ◽  
Zno Films ◽  
Scanning Force Microscope ◽  
Force Microscopy ◽  
Pzt Thin Film ◽  
Maximum Range ◽  
Scanning Force ◽  
Natural Resonance Frequency ◽  
Piezoelectric Constants

AbstractThis paper reports on a multiprobe scanning force microscope (SFM) utilizing an array of individually controlled piezoelectric Pb(Zr,Ti)O3 (PZT) microcantilevers. Each cantilever is unimorph beam including a sol-gel derived PZT thin film that has high piezoelectric constants in comparison with sputtered ZnO films. The cantilever is excited and actuated in z direction by applying ac and feedback dc voltages to the PZT layer. The variation of vibration amplitude is detected by measuring the change of current through the PZT layer. The 200-μm-long PZT microcantilever with the natural resonance frequency of 63.8 kHz has the high actuation sensitivity of 150 nmN and the maximum range of more than 1.5 μm. By actuating the self-excited cantilever to keep the current constant, we have succeeded in independent dynamic operation without z feedback actuation of the sample-side scanner. We have obtained independent parallel 2 × 1 images using two cantilevers of the array.

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