Photo-Chemical Changes of Aluminium Films on Silicon
Keyword(s):
X Ray
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AbstractX-ray Photoelectron Spectroscopy and Rutherford Backscattering Spectroscopy with channeling are employed to study surface and interface changes resulting from irradiation of thin Al films on Si-SiO2 substrates using < 6eV visible photons. Results indicati that surface oxidation and bonding rearrangements at the Al-SiO2-Si interface can take place at room temperature under photon bombardment. These changes are correlated with enhanced adhesion and modification of film etch properties which are also a result of photon irradiation.
1998 ◽
Vol 16
(3)
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pp. 1103-1105
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1993 ◽
Vol 8
(10)
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pp. 2679-2685
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1994 ◽
Vol 12
(1)
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pp. 35-43
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1990 ◽
Vol 8
(3)
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pp. 2251-2254
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1999 ◽
Vol 14
(8)
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pp. 3185-3188
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