Imprint Materials for Nanoscale Devices

Michael D. Stewart; C. Grant Willson

doi:10.1557/mrs2005.248

Imprint Materials for Nanoscale Devices

MRS Bulletin ◽

10.1557/mrs2005.248 ◽

2005 ◽

Vol 30 (12) ◽

pp. 947-951 ◽

Cited By ~ 43

Author(s):

Michael D. Stewart ◽

C. Grant Willson

Keyword(s):

High Resolution ◽

Integrated Circuit ◽

Nanoimprint Lithography ◽

Low Cost ◽

Microfluidic Devices ◽

Development Work ◽

New Materials ◽

Related Development ◽

Patterning Technique ◽

Processing Techniques

AbstractNanoimprint lithography is a potentially low-cost, high-resolution patterning technique, but most of the surrounding development work has been directed toward tool designs and processing techniques. There remains a tremendous opportunity and need to develop new materials for specific nanoimprint applications. This article provides an overview of relevant materials-related development work for nanoimprint lithographic applications. Material requirements for nanoimprint patterning for the sub-45-nm integrated-circuit regime are discussed, along with proposed nanoimprint applications such as imprintable dielectrics, conducting polymers, biocompatible materials, and materials for microfluidic devices. Polymers available for thermal nanoimprint processing and photocurable precursors for ultraviolet-assisted nanoimprint lithography are discussed.

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Pushing the Limits of Spatial Assay Resolution for Paper-Based Microfluidics Using Low-Cost and High-Throughput Pen Plotter Approach

Micromachines ◽

10.3390/mi11060611 ◽

2020 ◽

Vol 11 (6) ◽

pp. 611

Author(s):

Reza Amin ◽

Fariba Ghaderinezhad ◽

Caleb Bridge ◽

Mikail Temirel ◽

Scott Jones ◽

...

Keyword(s):

High Resolution ◽

Low Cost ◽

Microfluidic Devices ◽

Regenerated Cellulose ◽

Substrate Thickness ◽

Paper Substrate ◽

Cellulose Paper ◽

Fabrication Cost ◽

Paper Based Microfluidics ◽

Colorimetric Assays

To transform from reactive to proactive healthcare, there is an increasing need for low-cost and portable assays to continuously perform health measurements. The paper-based analytical devices could be a potential fit for this need. To miniaturize the multiplex paper-based microfluidic analytical devices and minimize reagent use, a fabrication method with high resolution along with low fabrication cost should be developed. Here, we present an approach that uses a desktop pen plotter and a high-resolution technical pen for plotting high-resolution patterns to fabricate miniaturized paper-based microfluidic devices with hundreds of detection zones to conduct different assays. In order to create a functional multiplex paper-based analytical device, the hydrophobic solution is patterned on the cellulose paper and the reagents are deposited in the patterned detection zones using the technical pens. We demonstrated the effect of paper substrate thickness on the resolution of patterns by investigating the resolution of patterns on a chromatography paper with altered effective thickness. As the characteristics of the cellulose paper substrate such as thickness, resolution, and homogeneity of pore structure affect the obtained patterning resolution, we used regenerated cellulose paper to fabricate detection zones with a diameter as small as 0.8 mm. Moreover, in order to fabricate a miniaturized multiplex paper-based device, we optimized packing of the detection zones. We also showed the capability of the presented method for fabrication of 3D paper-based microfluidic devices with hundreds of detection zones for conducting colorimetric assays.

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Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography

Nanomaterials ◽

10.3390/nano8080609 ◽

2018 ◽

Vol 8 (8) ◽

pp. 609 ◽

Cited By ~ 4

Author(s):

Cecilia Masciullo ◽

Agnese Sonato ◽

Filippo Romanato ◽

Marco Cecchini

Keyword(s):

High Resolution ◽

Nanoimprint Lithography ◽

Soft Lithography ◽

Low Cost ◽

Mold Surface ◽

Large Area ◽

Silicon Mold ◽

Thermoplastic Material ◽

Hard Materials ◽

Pdms Elastomer

Among soft lithography techniques, Thermal Nanoimprint Lithography (NIL) is a high-throughput and low-cost process that can be applied to a broad range of thermoplastic materials. By simply applying the appropriate pressure and temperature combination, it is possible to transfer a pattern from a mold surface to the chosen material. Usually, high-resolution and large-area NIL molds are difficult to fabricate and expensive. Furthermore, they are typically made of silicon or other hard materials such as nickel or quartz for preserving their functionality. Nonetheless, after a large number of imprinting cycles, they undergo degradation and become unusable. In this paper, we introduce and characterize an innovative two-step NIL process based on the use of a perfluoropolyether (PFPE) intermediate mold to replicate sub-100 nm features from a silicon mold to the final thermoplastic material. We compare PFPE elastomeric molds with molds made of the standard polydimethylsiloxane (PDMS) elastomer, which demonstrates better resolution and fidelity of the replica process. By using PFPE intermediate molds, the nanostructured masters are preserved and the throughput of the process is significantly enhanced.

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Low-cost, high-throughput fabrication of cloth-based microfluidic devices using a photolithographical patterning technique

Lab on a Chip ◽

10.1039/c4lc01135j ◽

2015 ◽

Vol 15 (6) ◽

pp. 1598-1608 ◽

Cited By ~ 29

Author(s):

Peijing Wu ◽

Chunsun Zhang

Keyword(s):

High Throughput ◽

Low Cost ◽

Microfluidic Devices ◽

Patterning Technique

Simple, low-cost and high-throughput fabrication of microfluidic cloth-based analytical devices (μCADs) using a photolithographical patterning technique.

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UV-nanoimprint lithography as a tool to develop flexible microfluidic devices for electrochemical detection

Lab on a Chip ◽

10.1039/c5lc00515a ◽

2015 ◽

Vol 15 (14) ◽

pp. 3086-3094 ◽

Cited By ~ 55

Author(s):

Juhong Chen ◽

Yiliang Zhou ◽

Danhui Wang ◽

Fei He ◽

Vincent M. Rotello ◽

...

Keyword(s):

Rapid Method ◽

Electrochemical Detection ◽

Microfluidic Device ◽

Nanoimprint Lithography ◽

Low Cost ◽

Microfluidic Devices

A low-cost and rapid method is developed to fabricate a flexible microfluidic device containing electrowetting valves and electrochemical transduction.

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A new type of defect structure in 124-superconducting oxide revealed by HREM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100089779 ◽

1991 ◽

Vol 49 ◽

pp. 1092-1093

Author(s):

R. Sharma ◽

B.L. Ramakrishna ◽

N.N. Thadhani ◽

D. Hianes ◽

Z. Iqbal

Keyword(s):

Shock Wave ◽

Defect Structure ◽

Neutron Radiation ◽

Weak Links ◽

Defect Structures ◽

New Materials ◽

New Type ◽

Current Densities ◽

Processing Techniques ◽

Microstructural Studies

After materials with superconducting temperatures higher than liquid nitrogen have been prepared, more emphasis has been on increasing the current densities (Jc) of high Tc superconductors than finding new materials with higher transition temperatures. Different processing techniques i.e thin films, shock wave processing, neutron radiation etc. have been applied in order to increase Jc. Microstructural studies of compounds thus prepared have shown either a decrease in gram boundaries that act as weak-links or increase in defect structure that act as flux-pinning centers. We have studied shock wave synthesized Tl-Ba-Cu-O and shock wave processed Y-123 superconductors with somewhat different properties compared to those prepared by solid-state reaction. Here we report the defect structures observed in the shock-processed Y-124 superconductors.

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Picture-processing techniques for geometrical tolerance checking of integrated-circuit layouts

IEE Proceedings E Computers and Digital Techniques ◽

10.1049/ip-e.1980.0005 ◽

1980 ◽

Vol 127 (1) ◽

pp. 8

Author(s):

J.R. Ullmann ◽

H.H. Lafferty

Keyword(s):

Integrated Circuit ◽

Picture Processing ◽

Processing Techniques

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Programmable Integrated Photonics

10.1093/oso/9780198844402.001.0001 ◽

2020 ◽

Cited By ~ 4

Author(s):

José Capmany ◽

Daniel Pérez

Keyword(s):

Integrated Circuit ◽

Performance Monitoring ◽

Low Cost ◽

Limiting Factors ◽

External Control ◽

Integrated Photonics ◽

New Paradigm ◽

Photonic Integrated Circuit ◽

And Performance ◽

Application Fields

Programmable Integrated Photonics (PIP) is a new paradigm that aims at designing common integrated optical hardware configurations, which by suitable programming can implement a variety of functionalities that, in turn, can be exploited as basic operations in many application fields. Programmability enables by means of external control signals both chip reconfiguration for multifunction operation as well as chip stabilization against non-ideal operation due to fluctuations in environmental conditions and fabrication errors. Programming also allows activating parts of the chip, which are not essential for the implementation of a given functionality but can be of help in reducing noise levels through the diversion of undesired reflections. After some years where the Application Specific Photonic Integrated Circuit (ASPIC) paradigm has completely dominated the field of integrated optics, there is an increasing interest in PIP justified by the surge of a number of emerging applications that are and will be calling for true flexibility, reconfigurability as well as low-cost, compact and low-power consuming devices. This book aims to provide a comprehensive introduction to this emergent field covering aspects that range from the basic aspects of technologies and building photonic component blocks to the design alternatives and principles of complex programmable photonics circuits, their limiting factors, techniques for characterization and performance monitoring/control and their salient applications both in the classical as well as in the quantum information fields. The book concentrates and focuses mainly on the distinctive features of programmable photonics as compared to more traditional ASPIC approaches.

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Microfabrication with Very Low-Average Power of Green Light to Produce PDMS Microchips

Polymers ◽

10.3390/polym13040607 ◽

2021 ◽

Vol 13 (4) ◽

pp. 607

Author(s):

Lucero M. Hernandez-Cedillo ◽

Francisco G. Vázquez-Cuevas ◽

Rafael Quintero-Torres ◽

Jose L. Aragón ◽

Miguel Angel Ocampo Mortera ◽

...

Keyword(s):

Low Cost ◽

Average Power ◽

Green Light ◽

Microfluidic Devices ◽

Processing Parameters ◽

Coating Film ◽

Two Dimensional ◽

Dimethyl Siloxane ◽

Visible Laser ◽

High Absorption

In this article, we show an alternative low-cost fabrication method to obtain poly(dimethyl siloxane) (PDMS) microfluidic devices. The proposed method allows the inscription of micron resolution channels on polystyrene (PS) surfaces, used as a mold for the wanted microchip’s production, by applying a high absorption coating film on the PS surface to ablate it with a focused low-power visible laser. The method allows for obtaining micro-resolution channels at powers between 2 and 10 mW and can realize any two-dimensional polymeric devices. The effect of the main processing parameters on the channel’s geometry is presented.

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Multi-Blockchain-Based IoT Data Processing Techniques to Ensure the Integrity of IoT Data in AIoT Edge Computing Environments

Sensors ◽

10.3390/s21103515 ◽

2021 ◽

Vol 21 (10) ◽

pp. 3515

Author(s):

Sung-Ho Sim ◽

Yoon-Su Jeong

Keyword(s):

Low Cost ◽

Third Party ◽

Monitoring And Control ◽

Constant Size ◽

Computing Environments ◽

Iot Devices ◽

Cloud Servers ◽

The Cost ◽

Processing Techniques ◽

And Control

As the development of IoT technologies has progressed rapidly recently, most IoT data are focused on monitoring and control to process IoT data, but the cost of collecting and linking various IoT data increases, requiring the ability to proactively integrate and analyze collected IoT data so that cloud servers (data centers) can process smartly. In this paper, we propose a blockchain-based IoT big data integrity verification technique to ensure the safety of the Third Party Auditor (TPA), which has a role in auditing the integrity of AIoT data. The proposed technique aims to minimize IoT information loss by multiple blockchain groupings of information and signature keys from IoT devices. The proposed technique allows IoT information to be effectively guaranteed the integrity of AIoT data by linking hash values designated as arbitrary, constant-size blocks with previous blocks in hierarchical chains. The proposed technique performs synchronization using location information between the central server and IoT devices to manage the cost of the integrity of IoT information at low cost. In order to easily control a large number of locations of IoT devices, we perform cross-distributed and blockchain linkage processing under constant rules to improve the load and throughput generated by IoT devices.

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