scholarly journals Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup

2020 ◽  
Vol 28 (14) ◽  
pp. 20489
Author(s):  
Lukas Bahrenberg ◽  
Serhiy Danylyuk ◽  
Sven Glabisch ◽  
Moein Ghafoori ◽  
Sophia Schröder ◽  
...  
2000 ◽  
Vol 39 (17) ◽  
pp. 2941 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Eric M. Gullikson ◽  
Jeffrey Bokor

2013 ◽  
Vol 88 (3) ◽  
Author(s):  
David Gauthier ◽  
Benoît Mahieu ◽  
Giovanni De Ninno
Keyword(s):  

Author(s):  
Sophia Schröder ◽  
Lukas Bahrenberg ◽  
Bernhard Lüttgenau ◽  
Sven Glabisch ◽  
Serhiy Danylyuk ◽  
...  

2015 ◽  
Author(s):  
Miloslav Ohlídal ◽  
Ivan Ohlidal ◽  
David Nečas ◽  
Jiří Vodák ◽  
Daniel Franta ◽  
...  

2005 ◽  
Vol 86 (18) ◽  
pp. 181107 ◽  
Author(s):  
Michiteru Yamaura ◽  
Shigeaki Uchida ◽  
Atsushi Sunahara ◽  
Yoshinori Shimada ◽  
Hiroaki Nishimura ◽  
...  

2016 ◽  
Vol 119 (9) ◽  
pp. 095301 ◽  
Author(s):  
M. G. Sertsu ◽  
A. Giglia ◽  
S. Brose ◽  
D. Park ◽  
Z. S. Wang ◽  
...  
Keyword(s):  

2018 ◽  
Vol 25 (1) ◽  
pp. 32-38 ◽  
Author(s):  
F. Capotondi ◽  
L. Foglia ◽  
M. Kiskinova ◽  
C. Masciovecchio ◽  
R. Mincigrucci ◽  
...  

The characterization of the time structure of ultrafast photon pulses in the extreme-ultraviolet (EUV) and soft X-ray spectral ranges is of high relevance for a number of scientific applications and photon diagnostics. Such measurements can be performed following different strategies and often require large setups and rather high pulse energies. Here, high-quality measurements carried out by exploiting the transient grating process,i.e.a third-order non-linear process sensitive to the time-overlap between two crossed EUV pulses, is reported. From such measurements it is possible to obtain information on both the second-order intensity autocorrelation function and on the coherence length of the pulses. It was found that the pulse energy density needed to carry out such measurements on solid state samples can be as low as a few mJ cm−2. Furthermore, the possibility to control the arrival time of the crossed pulses independently might permit the development of a number of coherent spectroscopies in the EUV and soft X-ray regime, such as, for example, photon echo and two-dimensional spectroscopy.


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