Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths
Keyword(s):
2006 ◽
Vol 5
(3)
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pp. 033006
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2005 ◽
Vol 23
(6)
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pp. 2840
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Keyword(s):
2003 ◽
Vol 74
(2)
◽
pp. 969-974
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