Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet

2021 ◽  
Author(s):  
Sophia Schröder ◽  
Lukas Bahrenberg ◽  
Bernhard Lüttgenau ◽  
Sven Glabisch ◽  
Serhiy Danylyuk ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Latent Image ◽  
Spectroscopic Reflectometry

Effects of Rate Constant for Deprotection on Latent Image Formation in Chemically Amplified Extreme Ultraviolet Resists

2008 ◽  
Vol 47 (6) ◽  
pp. 4926-4931 ◽  
Author(s):  
Takahiro Kozawa ◽  
Seiichi Tagawa ◽  
Julius Joseph Santillan ◽  
Minoru Toriumi ◽  
Toshiro Itani
Keyword(s):  
Rate Constant ◽  
Extreme Ultraviolet ◽  
Image Formation ◽  
Latent Image ◽  
Chemically Amplified

scholarly journals Reconstructing the three-dimensional latent image of extreme ultraviolet resists with resonant soft x-ray scattering

2019 ◽  
Vol 18 (02) ◽  
pp. 1 ◽  
Author(s):  
Guillaume Freychet ◽  
Isvar A. Cordova ◽  
Terry McAfee ◽  
Dinesh Kumar ◽  
Ronald J. Pandolfi ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Three Dimensional ◽  
Latent Image ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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