scholarly journals Surface and thickness measurement of a transparent film using wavelength scanning interferometry

2012 ◽  
Vol 20 (19) ◽  
pp. 21450 ◽  
Author(s):  
Feng Gao ◽  
Hussam Muhamedsalih ◽  
Xiangqian Jiang
Keyword(s):  
Thickness Measurement ◽  
Transparent Film ◽  
Wavelength Scanning

Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer

2004 ◽  
Author(s):  
Pasquale Maddaloni ◽  
Giuseppe Coppola ◽  
Paolo de Natale ◽  
Sergio de Nicola ◽  
Pietro Ferraro ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Thickness measurement of dielectric films by wavelength scanning method

2002 ◽  
Vol 205 (1-3) ◽  
pp. 1-6 ◽  
Author(s):  
Oğuz Köysal ◽  
Duygu Önal ◽  
Serhat Özder ◽  
F. Necati Ecevit
Keyword(s):  
Thickness Measurement ◽  
Dielectric Films ◽  
Scanning Method ◽  
Wavelength Scanning

Thickness Measurement of Thin Transparent Plates With a Broad-Band Wavelength Scanning Interferometer

2004 ◽  
Vol 16 (5) ◽  
pp. 1349-1351 ◽  
Author(s):  
P. Maddaloni ◽  
G. Coppola ◽  
P. De Natale ◽  
S. De Nicola ◽  
P. Ferraro ◽  
...  
Keyword(s):  
Broad Band ◽  
Thickness Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error

2021 ◽  
Vol 28 (1) ◽  
pp. 48-57
Author(s):  
Sungtae Kim ◽  
Yangjin Kim ◽  
Sung-Chul Shin ◽  
Kenichi Hibino ◽  
Naohiko Sugita
Keyword(s):  
Phase Error ◽  
Glass Plate ◽  
Thickness Measurement ◽  
Phase Shifting ◽  
Wavelength Scanning

Thickness measurement of transparent film by white-light interferometry

2016 ◽  
Author(s):  
Qinyuan Deng ◽  
Yi Zhou ◽  
Junbo Liu ◽  
Jingwei Yao ◽  
Song Hu
Keyword(s):  
White Light ◽  
Thickness Measurement ◽  
Transparent Film ◽  
White Light Interferometry

Thickness Measurement in the AEM by Macintosh-Based Analysis of Two-Beam Convergent Beam Patterns

1990 ◽  
Vol 48 (2) ◽  
pp. 504-505
Author(s):  
John F. Mansfield ◽  
Douglas C. Crawford
Keyword(s):  
Electron Microscope ◽  
Video Camera ◽  
Thickness Measurement ◽  
Specimen Thickness ◽  
Crystalline Materials ◽  
Beam Dynamic ◽  
Line Measurement ◽  
On Line ◽  
Image Position ◽  
Convergent Beam

A method has been developed that allows on-line measurement of the thickness of crystalline materials in the analytical electron microscope. Two-beam convergent beam electron diffraction (CBED) patterns are digitized from a JEOL 2000FX electron microscope into an Apple Macintosh II microcomputer via a Gatan #673 CCD Video Camera and an Imaging Systems Technology Video 1000 frame-capture board. It is necessary to know the lattice parameters of the sample since measurements are made of the spacing of the diffraction discs in order to calibrate the pattern. The sample thickness is calculated from measurements of the spacings of the fringes that are seen in the diffraction discs. This technique was pioneered by Kelly et al, who used the two-beam dynamic theory of MacGillavry relate the deviation parameter (Si) of the ith fringe from the exact Bragg condition to the specimen thickness (t) with the equation:Where ξg, is the extinction distance for that reflection and ni is an integer.

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