Absolute thickness measurement of silicon wafer using wavelength scanning interferometer

2011 ◽  
Author(s):  
Young-Sik Ghim ◽  
Amit Suratkar ◽  
Angela Davies ◽  
Yun-Woo Lee
Keyword(s):  
Silicon Wafer ◽  
Thickness Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer

2004 ◽  
Author(s):  
Pasquale Maddaloni ◽  
Giuseppe Coppola ◽  
Paolo de Natale ◽  
Sergio de Nicola ◽  
Pietro Ferraro ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Thickness Measurement of Thin Transparent Plates With a Broad-Band Wavelength Scanning Interferometer

2004 ◽  
Vol 16 (5) ◽  
pp. 1349-1351 ◽  
Author(s):  
P. Maddaloni ◽  
G. Coppola ◽  
P. De Natale ◽  
S. De Nicola ◽  
P. Ferraro ◽  
...  
Keyword(s):  
Broad Band ◽  
Thickness Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

scholarly journals Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using Magnetic Resonance Coupling for Stress Free Polishing Application

IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 75330-75341 ◽  
Author(s):  
Zilian Qu ◽  
Wensong Wang ◽  
Shuhui Yang ◽  
Quqin Sun ◽  
Zhongyuan Fang ◽  
...  
Keyword(s):  
Magnetic Resonance ◽  
Silicon Wafer ◽  
Thickness Measurement ◽  
Cu Film ◽  
Magnetic Resonance Coupling ◽  
Resonance Coupling

scholarly journals Surface and thickness measurement of a transparent film using wavelength scanning interferometry

2012 ◽  
Vol 20 (19) ◽  
pp. 21450 ◽  
Author(s):  
Feng Gao ◽  
Hussam Muhamedsalih ◽  
Xiangqian Jiang
Keyword(s):  
Thickness Measurement ◽  
Transparent Film ◽  
Wavelength Scanning

Error analysis on the phase calculation from superimposed interferograms generated by a wavelength scanning interferometer

1990 ◽  
Vol 77 (5-6) ◽  
pp. 343-348 ◽  
Author(s):  
Katsuyuki Okada ◽  
Hironobu Sakuta ◽  
Teruji Ose ◽  
Jumpei Tsujiuchi
Keyword(s):  
Error Analysis ◽  
Phase Calculation ◽  
Wavelength Scanning ◽  
Scanning Interferometer
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