Transparent film thickness measurement by three-wavelength interference method: An extended application of Global Model Fitting algorithm

2012 ◽  
Author(s):  
Katsuichi Kitagawa
Keyword(s):  
Film Thickness ◽  
Model Fitting ◽  
Thickness Measurement ◽  
Global Model ◽  
Interference Method ◽  
Transparent Film ◽  
Extended Application ◽  
Fitting Algorithm ◽  
Film Thickness Measurement

Nanoscale film thickness measurement based on weak measurement

2020 ◽  
Vol 91 (12) ◽  
pp. 123111
Author(s):  
Zirui Qin ◽  
Qinggang Liu ◽  
Chong Yue ◽  
Yaopu Lang ◽  
Xinglin Zhou
Keyword(s):  
Film Thickness ◽  
Thickness Measurement ◽  
Weak Measurement ◽  
Film Thickness Measurement

Automatic interference method for measuring transparent film thickness

1993 ◽  
Vol 32 (13) ◽  
pp. 2292 ◽  
Author(s):  
A. González-Cano ◽  
E. Bernabéu
Keyword(s):  
Film Thickness ◽  
Interference Method ◽  
Transparent Film
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