Thickness measurement of transparent film by white-light interferometry

2016 ◽  
Author(s):  
Qinyuan Deng ◽  
Yi Zhou ◽  
Junbo Liu ◽  
Jingwei Yao ◽  
Song Hu
Keyword(s):  
White Light ◽  
Thickness Measurement ◽  
Transparent Film ◽  
White Light Interferometry

Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry

2020 ◽  
Vol 69 (5) ◽  
pp. 2507-2514
Author(s):  
Xu Lu ◽  
Yonggui Yuan ◽  
Chi Ma ◽  
Haibo Zhu ◽  
Yunlong Zhu ◽  
...  
Keyword(s):  
White Light ◽  
Thickness Measurement ◽  
White Light Interferometry

Noncontact thickness measurement of metal foil by means of differential white light interferometry

2005 ◽  
Author(s):  
Yanli Du ◽  
Huimin Yan ◽  
Yong Wu ◽  
Xiaoqiang Yao ◽  
Yongjun Nie ◽  
...  
Keyword(s):  
White Light ◽  
Thickness Measurement ◽  
Metal Foil ◽  
White Light Interferometry

Fringe order identification in optical fibre white-light interferometry using centroid algorithm method

1992 ◽  
Vol 28 (6) ◽  
pp. 553 ◽  
Author(s):  
S. Chen ◽  
A.W. Palmer ◽  
K.T.V. Grattan ◽  
B.T. Meggitt
Keyword(s):  
Optical Fibre ◽  
White Light ◽  
White Light Interferometry ◽  
Fringe Order ◽  
Centroid Algorithm

scholarly journals Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2486
Author(s):  
Gert Behrends ◽  
Dirk Stöbener ◽  
Andreas Fischer
Keyword(s):  
White Light ◽  
Lateral Displacement ◽  
Displacement Measurement ◽  
Accurate Information ◽  
White Light Interferometry ◽  
Fully Integrated ◽  
Speckle Correlation ◽  
Dsc Measurements ◽  
Scanning White Light Interferometry ◽  
The Impact

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.

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