Effects of Ethylene/Ammonia Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

2013 ◽  
Vol 2 (4) ◽  
pp. N80-N88 ◽  
Author(s):  
Liang-Hsun Lai ◽  
Huei-Cheng Li ◽  
Sham-Tsong Shiue ◽  
Tsong-Jen Yang ◽  
Hung-Yi Lin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition

Effects of Ethylene/Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

2012 ◽  
Vol 159 (6) ◽  
pp. D367-D374 ◽  
Author(s):  
Liang-Hsun Lai ◽  
Ke-Jie Huang ◽  
Sham-Tsong Shiue ◽  
Jing-Tang Chang ◽  
Ju-Liang He
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition

scholarly journals Numerical Analysis of Deposition Rates of Zirconium Thin Films by Thermal Chemical Vapor Deposition

1992 ◽  
Vol 100 (1159) ◽  
pp. 266-271
Author(s):  
Shizuo NAKAMURA ◽  
Yoshishige HAYASHI ◽  
Takuya KAWANISHI ◽  
Toshiteru KOMATSU ◽  
Masashi TAKEUCHI
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Numerical Analysis ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition
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