Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

2011 ◽  
Vol 158 (7) ◽  
pp. D445 ◽  
Author(s):  
Chia-Ya Lin ◽  
Liang-Hsun Lai ◽  
Yu-Xian Liu ◽  
Sham-Tsong Shiue ◽  
Hung-Yi Lin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition ◽  
Ammonia Addition

Effects of Ethylene/Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

2012 ◽  
Vol 159 (6) ◽  
pp. D367-D374 ◽  
Author(s):  
Liang-Hsun Lai ◽  
Ke-Jie Huang ◽  
Sham-Tsong Shiue ◽  
Jing-Tang Chang ◽  
Ju-Liang He
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition

scholarly journals Numerical Analysis of Deposition Rates of Zirconium Thin Films by Thermal Chemical Vapor Deposition

1992 ◽  
Vol 100 (1159) ◽  
pp. 266-271
Author(s):  
Shizuo NAKAMURA ◽  
Yoshishige HAYASHI ◽  
Takuya KAWANISHI ◽  
Toshiteru KOMATSU ◽  
Masashi TAKEUCHI
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Numerical Analysis ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Rates ◽  
Thermal Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document