Design and Fabrication Using Hot Embossing Lithography of a Microfluidic Chip for Microsphere Single-Pass Applications

2019 ◽  
Vol 27 (1) ◽  
pp. 97-102
Author(s):  
Huaibo Qu ◽  
Ruixia Yang ◽  
Suying Yao ◽  
Peng Gao
Keyword(s):  
Microfluidic Chip ◽  
Hot Embossing ◽  
Single Pass

Design and Fabrication of Micro Hot Embossing Mold for Microfluidic Chip Used in Flow Cytometry

2007 ◽  
Vol 339 ◽  
pp. 246-251
Author(s):  
L.Q. Du ◽  
C. Liu ◽  
H.J. Liu ◽  
J. Qin ◽  
N. Li ◽  
...  
Keyword(s):  
Flow Cytometry ◽  
Microfluidic Chip ◽  
Low Cost ◽  
Hot Embossing ◽  
Microfluidic Chips ◽  
Metal Mold ◽  
Nickel Electroforming ◽  
Thick Photoresist ◽  
Nickel Base ◽  
Microfabrication Technology

Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, high precision and mass-producing microfluidic chips have been fabricated and they have been used in flow cytometry

Microfluidic chip fabrication using hot embossing and thermal bonding of COP

2009 ◽  
Vol 21 (7) ◽  
pp. 457-466 ◽  
Author(s):  
Boe-Yu Pemg ◽  
Chih-Wei Wu ◽  
Yung-Kang Shen ◽  
Yi Lin
Keyword(s):  
Microfluidic Chip ◽  
Hot Embossing ◽  
Thermal Bonding ◽  
Chip Fabrication

Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold

2010 ◽  
Vol 23 (1) ◽  
pp. 57-64 ◽  
Author(s):  
Mao-Suan Huang ◽  
Yuh-Chyun Chiang ◽  
Sheng-Chieh Lin ◽  
Hsin-Chung Cheng ◽  
Chiung-Fang Huang ◽  
...  
Keyword(s):  
Microfluidic Chip ◽  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Hot Embossing ◽  
Micro Electrical Discharge Machining

Unsaturated Polyesters as Stamps for Hot Embossing of Micropumps

2014 ◽  
Vol 607 ◽  
pp. 547-550
Author(s):  
Yi Chu Hsu ◽  
Po Yuan Cheng ◽  
Hsiao Wei Lee ◽  
Shun Fua Su
Keyword(s):  
Mechanical Properties ◽  
Microfluidic Chip ◽  
Hot Embossing ◽  
Optical Microscope ◽  
Confocal Microscope ◽  
Curing Process ◽  
Unsaturated Polyesters ◽  
Peristaltic Micropump ◽  
Micro Actuators ◽  
Width Change

We investigated two processes to fabricate unsaturated polyesters, UP, to serve as a stamp to emboss a microfluidic chip to apply to a peristaltic micropump. The mechanical properties of UP are great to apply to vibration type micro-actuators. However, it’s rarely discussed academically. As a result, we proposed two processes developed and compared macro-and micro-scopically. It was first observed that process I of traditional UP curing process and process II of modified process can both replicate the geometries of microfludic chips well macroscopically. In addition, the former one has macroscopic defaults like cracks, bend, and separation between vessel and UP molds, while the latter one doesn’t. Optical microscope and confocal microscope are also applied to verify the replication effects microscopically. Again, both processes illustrate good replication results with variation of both lengths and areas all less than 10%, while process II has better geometries and lower deviation on different sites. The process I was proven that the averages of depth and widest width change rates for replication are-1.06% (between-4.15% and 2.89%) and-2.77% (between-6.93% and 0.67%), respectively. And, the replication results of process II shows also reasonable change and even smaller deviations that the averages of depth and widest width change rates are-4.77% (between-6.33% and-3.84%) and 1.53% (between 1.15% and 2.15%), respectively.

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