A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist

Due to the increasing complexity of microelectromechanical system (MEMS) devices, the accuracy and precision of two-dimensional microstructures of SU-8 negative thick photoresist have drawn more attention with the rapid development of UV lithography technology. This paper presents a high-precision lithography simulation model for thick SU-8 photoresist based on waveguide method to calculate light intensity in the photoresist and predict the profiles of developed SU-8 structures in two dimension. This method is based on rigorous electromagnetic field theory. The parameters that have significant influence on profile quality were studied. Using this model, the light intensity distribution was calculated, and the final resist morphology corresponding to the simulation results was examined. A series of simulations and experiments were conducted to verify the validity of the model. The simulation results were found to be in good agreement with the experimental results, and the simulation system demonstrated high accuracy and efficiency, with complex cases being efficiently handled.

Micropatterning Method for Porous Materials Using the Difference of the Glass Transition Temperature between Exposed and Unexposed Areas of a Thick-Photoresist

A cell culture on a scaffold has the advantages of functionality and easy handling, because the geometry of the cellular tissue is controlled by designing the scaffold. To create complex cellular tissue, scaffolds should be complex two-dimensional (2D) and three-dimensional (3D) structures. However, it is difficult to fabricate a scaffold with a 2D and 3D structure because the shape, size, and fabrication processes of a 2D structure in creating a cell layer, and a 3D structure containing cells, are different. In this research, we propose a micropatterning method for porous materials using the difference of the glass transition temperature between exposed and unexposed areas of a thick-photoresist. Since the proposed method does not require a vacuum, high temperature, or high voltage, it can be used for fabricating various structures with a wide range of scales, regardless of the materials used. Additionally, the patterning area can be fabricated accurately by photolithography. To evaluate the proposed method, a membrane integrated scaffold (MIS) with a 2D porous membrane and 3D porous material was fabricated. The MIS had a porous membrane with a pore size of 4 μm or less, which was impermeable to cells, and a porous material which was capable of containing cells. By seeding HUVECs and HeLa cells on each side of the MIS, the cellular tissue was formed with the designed geometry.

Integration Method of Microchannel and Vertical Micromesh Structure for Three-Dimensional Cell Culture Using Inclined Exposure and Inclined Oxygen Ashing

Culturing cellular tissues inside a microchannel using an artificial three-dimensional (3D) microstructure is normally conducted to elucidate and reproduce a biological function. The thick photoresist SU-8, which has a microscale resolution and high aspect ratio, is widely used for the fabrication of microchannels and scaffolds having 3D structures for cell culture. However, it is difficult to accurately fabricate a mesh structure with a pore size that is smaller than the cells that has an overall height greater than 50 μm because of the deterioration of the verticality of exposure light and the diffusion of acid, which accelerates the crosslinking reaction in the SU-8 layer. In this study, we propose a method of integrating a vertical porous membrane into a microchannel. The resolution of the vertical porous membrane becomes more accurate through inclined oxygen ashing, without degrading the robustness. Because a single mask pattern is required for the proposed method, assembly error is not generated using the assembly-free process. The fabricated vertical porous membrane in the microchannel contained micropores that were smaller than the cells and sufficiently robust for a microfluidic system. HepG2 cells were attached three-dimensionally on the fabricated vertical porous membrane to demonstrate 3D cell culture.