Microfluidic chip fabrication using hot embossing and thermal bonding of COP

2009 ◽  
Vol 21 (7) ◽  
pp. 457-466 ◽  
Author(s):  
Boe-Yu Pemg ◽  
Chih-Wei Wu ◽  
Yung-Kang Shen ◽  
Yi Lin
Keyword(s):  
Microfluidic Chip ◽  
Hot Embossing ◽  
Thermal Bonding ◽  
Chip Fabrication

Optimization of hybrid microfluidic chip fabrication methods for biomedical application

2020 ◽  
Vol 24 (9) ◽  
Author(s):  
Sanja Kojić ◽  
Slobodan Birgermajer ◽  
Vasa Radonić ◽  
Ivana Podunavac ◽  
Jovana Jevremov ◽  
...  
Keyword(s):  
Microfluidic Chip ◽  
Biomedical Application ◽  
Chip Fabrication

A spring-driven press device for hot embossing and thermal bonding of PMMA microfluidic chips

2010 ◽  
Vol 31 (15) ◽  
pp. 2512-2519 ◽  
Author(s):  
Zhi Chen ◽  
Luyan Zhang ◽  
Gang Chen
Keyword(s):  
Hot Embossing ◽  
Microfluidic Chips ◽  
Thermal Bonding

Design and Fabrication Using Hot Embossing Lithography of a Microfluidic Chip for Microsphere Single-Pass Applications

2019 ◽  
Vol 27 (1) ◽  
pp. 97-102
Author(s):  
Huaibo Qu ◽  
Ruixia Yang ◽  
Suying Yao ◽  
Peng Gao
Keyword(s):  
Microfluidic Chip ◽  
Hot Embossing ◽  
Single Pass

Design and Fabrication of Micro Hot Embossing Mold for Microfluidic Chip Used in Flow Cytometry

2007 ◽  
Vol 339 ◽  
pp. 246-251
Author(s):  
L.Q. Du ◽  
C. Liu ◽  
H.J. Liu ◽  
J. Qin ◽  
N. Li ◽  
...  
Keyword(s):  
Flow Cytometry ◽  
Microfluidic Chip ◽  
Low Cost ◽  
Hot Embossing ◽  
Microfluidic Chips ◽  
Metal Mold ◽  
Nickel Electroforming ◽  
Thick Photoresist ◽  
Nickel Base ◽  
Microfabrication Technology

Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, high precision and mass-producing microfluidic chips have been fabricated and they have been used in flow cytometry

Study on the Manufacturing Process of Polymer Microfluidic Chip with Integrated Cu Micro Array Electrode

2015 ◽  
Vol 723 ◽  
pp. 884-887
Author(s):  
Yao Xin Gu ◽  
Hong Chao Qiao
Keyword(s):  
Microfluidic Chip ◽  
Manufacturing Process ◽  
Oxygen Plasma ◽  
Bonding Temperature ◽  
Cover Plate ◽  
Oxygen Plasma Treatment ◽  
Thermal Bonding ◽  
Array Electrode ◽  
Micro Channels ◽  
Micro Array

To produce perfect polymer microfluidic chip with integrated metal micro array electrode, an oxygen-plasma assisted manufacturing process was developed. The Cu micro array electrodes on the poly substrate was formed by photolithography, sputtering and wet etching; the micro channels on the polymer plate were hot-embossed using metal master; the bonding of cover plate and substrate using thermal bonding. The surface of the polymer plate with micro channels was treated by oxygen-plasma before thermal bonding. The oxygen-plasma treatment could decrease thermal bonding temperature from 100 °C to 85 °C. The bonding of this chip is complete, the micro electrode array keeps its integrity, and the micro channel is not distorted obviously.

Sign in / Sign up

Export Citation Format

Share Document