Formation and Characterization of Thin Silicon Dioxide Films Obtained by Inductively-Coupled High-Density Plasmas using a Dual Rotated Spiral Antenna System

2019 ◽  
Vol 25 (6) ◽  
pp. 173-178 ◽  
Author(s):  
Yil Wook Kim ◽  
Sang Ho Woo ◽  
Hai-Won Kim ◽  
Pyung Yong Um ◽  
Jung-Min Ji ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Antenna System ◽  
High Density ◽  
Spiral Antenna ◽  
Inductively Coupled ◽  
Silicon Dioxide Films ◽  
Thin Silicon

The Growth and Characterization of Very Thin Silicon Dioxide Films

1980 ◽  
Vol 127 (8) ◽  
pp. 1787-1794 ◽  
Author(s):  
A. C. Adams ◽  
T. E. Smith ◽  
C. C. Chang
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films
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