A new type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon

2002 ◽  
Author(s):  
W.S. Lau ◽  
K.S. Pey ◽  
W.T. Ng ◽  
V. Sane ◽  
J.M.C. Heng ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Type Silicon ◽  
Silicon Dioxide Films ◽  
New Type ◽  
Thin Silicon ◽  
Local Defects ◽  
P Type

Tunneling Current in Thin Silicon Dioxide Films

1994 ◽  
Vol 342 ◽  
Author(s):  
Sufi Zafar ◽  
J. C. Poler ◽  
E. A. Irene ◽  
X. Xu ◽  
G. Haines ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Thermal Oxidation ◽  
Electric Fields ◽  
Tunneling Current ◽  
Chemical Vapor ◽  
Silicon Dioxide Films ◽  
Thin Silicon ◽  
Tunneling Currents ◽  
Dc Component ◽  
P Type

ABSTRACTTunneling currents through thin silicon dioxide films on p-type silicon are measured at electric fields greater than 5 MV/cm. At the onset of the Fowler-Nordheim tunneling, oscillations in the current are observed. These oscillations are used for characterizing oxide films grown by three different processes: rapid thermal chemical vapor deposition, rapid thermal oxidation and thermal oxidation. We have explored the correlation between the oscillatory tunneling currents and the breakdown fields, and find a low field dc component to correlate with the breakdown fields and obscure the oscillations.

True oxide electron beam induced current for low‐voltage imaging of local defects in very thin silicon dioxide films

1993 ◽  
Vol 63 (16) ◽  
pp. 2240-2242 ◽  
Author(s):  
W. S. Lau ◽  
D. S. H. Chan ◽  
J. C. H. Phang ◽  
K. W. Chow ◽  
K. S. Pey ◽  
...  
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide ◽  
Low Voltage ◽  
Induced Current ◽  
Voltage Imaging ◽  
Silicon Dioxide Films ◽  
Electron Beam Induced Current ◽  
Thin Silicon ◽  
Local Defects

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Hydrides and Hydroxyls in Thin Silicon Dioxide Films

1971 ◽  
Vol 118 (4) ◽  
pp. 614 ◽  
Author(s):  
K. H. Beckmann ◽  
N. J. Harrick
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon
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