Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films

Characterization of Thermally Annealed Fluorinated Silicon Dioxide Films Prepared by Liquid-Phase Deposition

2005 ◽  
Vol 44 (No. 6) ◽  
pp. L220-L223 ◽  
Author(s):  
Ming-Kwei Lee ◽  
Chung-Min Shih ◽  
Shu-Ming Chang ◽  
Hong-Chi Wang ◽  
Jung-Jie Huang
Keyword(s):  
Liquid Phase ◽  
Silicon Dioxide ◽  
Liquid Phase Deposition ◽  
Silicon Dioxide Films

Characterization of silicon dioxide films deposited at low pressure and temperature in a helicon diffusion reactor

1993 ◽  
Vol 11 (6) ◽  
pp. 2954-2963 ◽  
Author(s):  
C. Charles ◽  
G. Giroult‐Matlakowski ◽  
R. W. Boswell ◽  
A. Goullet ◽  
G. Turban ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Low Pressure ◽  
Silicon Dioxide Films

Characterization of fluorine-doped silicon dioxide films by Raman spectroscopy and Electron-spin resonance

2007 ◽  
Vol 515 (17) ◽  
pp. 6682-6685 ◽  
Author(s):  
K. Matsuda ◽  
Y. Yamaguchi ◽  
N. Morita ◽  
T. Matsunobe ◽  
M. Yoshikawa
Keyword(s):  
Raman Spectroscopy ◽  
Electron Spin Resonance ◽  
Silicon Dioxide ◽  
Electron Spin ◽  
Silicon Dioxide Films ◽  
Spin Resonance ◽  
Doped Silicon

The Growth and Characterization of Very Thin Silicon Dioxide Films

1980 ◽  
Vol 127 (8) ◽  
pp. 1787-1794 ◽  
Author(s):  
A. C. Adams ◽  
T. E. Smith ◽  
C. C. Chang
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon
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