Effect of High-temperature Annealing on Evaporated Silicon Oxide Films: A Spectroscopic Ellipsometry Study

2019 ◽  
Vol 25 (3) ◽  
pp. 379-384
Author(s):  
Anna Szekeres ◽  
Emilia Vlaikova ◽  
Tivadar Lohner ◽  
Peter Petrik ◽  
Agnes Cziraki ◽  
...  
Keyword(s):  
High Temperature ◽  
Spectroscopic Ellipsometry ◽  
Silicon Oxide ◽  
Oxide Films ◽  
High Temperature Annealing

Spectroscopic ellipsometry on silicon-oxide films on silicon

1998 ◽  
Vol 335 (1-2) ◽  
pp. 253-257 ◽  
Author(s):  
G. Jungk ◽  
T. Grabolla
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Silicon Oxide ◽  
Oxide Films

Leakage Currents through Thin Silicon Oxide Grown on Atomically Flat Silicon Surfaces

2004 ◽  
Vol 849 ◽  
Author(s):  
Valerian Ignatescu ◽  
Jack M. Blakely
Keyword(s):  
High Temperature ◽  
Leakage Current ◽  
Silicon Oxide ◽  
Silicon Surfaces ◽  
High Temperature Annealing ◽  
Chemical Cleaning ◽  
Flat Surfaces ◽  
Stepped Surfaces ◽  
Thin Silicon ◽  
Atomically Flat

ABSTRACTAtomically flat surfaces can be obtained by high-temperature annealing in UHV of specially patterned silicon samples. Thin silicon oxide layers were grown by dry oxidation on three types of surfaces: (a) atomically flat surfaces, (b) normal (stepped) surfaces cleaned in UHV by the same high-temperature annealing and (c) normal wafer surfaces, which underwent just an RCA chemical cleaning before oxidation. Atomic force microscopy (AFM) was performed to reveal the topography of the surfaces. Aluminum pads were deposited on these oxidized surfaces using photolithography techniques. The leakage current through the oxide was measured for all three cases. Our results show that the smoother the surface before oxidation, the smaller the leakage current.

Residual Crystalline Silicon Phase in Silicon-Rich-Oxide Films Subjected to High Temperature Annealing

2002 ◽  
Vol 149 (7) ◽  
pp. G376 ◽  
Author(s):  
B. Fazio ◽  
M. Vulpio ◽  
C. Gerardi ◽  
Y. Liao ◽  
I. Crupi ◽  
...  
Keyword(s):  
High Temperature ◽  
Crystalline Silicon ◽  
Oxide Films ◽  
High Temperature Annealing ◽  
Silicon Phase
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