Deposition of Organic- Inorganic Hybrid Materials by Atomic Layer Deposition
Keyword(s):
2011 ◽
Vol 2011
(34)
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pp. 5305-5312
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Keyword(s):
Keyword(s):
2017 ◽
Vol 35
(1)
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pp. 01B107
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2016 ◽
Vol 4
(12)
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pp. 2382-2389
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2013 ◽
Vol 19
(4-6)
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pp. 142-148
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2013 ◽
Vol 14
(7)
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pp. 1737-1743
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