Atomic layer deposition of organic–inorganic hybrid materials based on saturated linear carboxylic acids
Keyword(s):
2011 ◽
Vol 2011
(34)
◽
pp. 5305-5312
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 35
(1)
◽
pp. 01B107
◽
Keyword(s):
2016 ◽
Vol 4
(12)
◽
pp. 2382-2389
◽