Organic-Inorganic Hybrid Nano-laminates Fabricated by Ozone-assisted Molecular-atomic Layer Deposition

2013 ◽  
Vol 19 (4-6) ◽  
pp. 142-148 ◽  
Author(s):  
Jie Huang ◽  
Mingun Lee ◽  
Antonio Lucero ◽  
Jiyoung Kim
2019 ◽  
Vol 16 (4) ◽  
pp. 3-14 ◽  
Author(s):  
Ola Nilsen ◽  
Karina Klepper ◽  
Heidi Nielsen ◽  
Helmer Fjellvaåg

2014 ◽  
Vol 43 (9) ◽  
pp. 3492-3500 ◽  
Author(s):  
K. B. Klepper ◽  
O. Nilsen ◽  
S. Francis ◽  
H. Fjellvåg

We investigated the influence of the functionality of organic ligands on film properties in organic–inorganic hybrid thin films deposited by atomic layer deposition.


2016 ◽  
Vol 4 (12) ◽  
pp. 2382-2389 ◽  
Author(s):  
Jie Huang ◽  
Hengji Zhang ◽  
Antonio Lucero ◽  
Lanxia Cheng ◽  
Santosh KC ◽  
...  

Molecular-atomic layer deposition (MALD) is employed to fabricate hydroquinone (HQ)/diethyl zinc (DEZ) organic–inorganic hybrid semiconductor thin films with accurate thickness control, sharp interfaces, and low deposition temperature.


2011 ◽  
Vol 40 (17) ◽  
pp. 4636 ◽  
Author(s):  
Karina Barnholt Klepper ◽  
Ola Nilsen ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer

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