atomic layer deposition process
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Surface Reactions Between LiHMDS, TMA and TMP leading to Deposition of Amorphous Lithium Phosphate

2022 ◽  
Author(s):  
Andreas Werbrouck ◽  
Felix Mattelaer ◽  
Arpan Dhara ◽  
Mikko Nisula ◽  
Matthias Marcus Minjauw ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Reactions ◽  
Atomic Layer ◽  
Deposition Process ◽  
Lithium Phosphate ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
The Impact

This work reports on the atomic layer deposition process combining lithium hexamethyl disilazide (LiHMDS) and trimethylphosphate (TMP), and studies the impact of adding a trimethylaluminum (TMA) pulse to this process....

Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma

2021 ◽  
Vol 130 (1) ◽  
pp. 013301
Author(s):  
Drahoslav Tvarog ◽  
Jiří Olejníček ◽  
Jiří Kratochvíl ◽  
Petra Kšírová ◽  
Aleš Poruba ◽  
...  
Keyword(s):  
Surface Wave ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

scholarly journals Toolbox for atomic layer deposition process development on high surface area powders

2021 ◽  
Vol 92 (2) ◽  
pp. 025115
Author(s):  
K. Knemeyer ◽  
R. Baumgarten ◽  
P. Ingale ◽  
R. Naumann d’Alnoncourt ◽  
M. Driess ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Area ◽  
Process Development ◽  
High Surface ◽  
High Surface Area ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition
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