Atomic Layer Deposition of Organic-Inorganic Hybrid Materials Based on Unsaturated Linear Carboxylic Acids
2011 ◽
Vol 2011
(34)
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pp. 5305-5312
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2017 ◽
Vol 35
(1)
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pp. 01B107
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2016 ◽
Vol 4
(12)
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pp. 2382-2389
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