Ferromagnetism in Cu-Doped ZnO Films Prepared by Filtered Cathodic Vacuum Arc Technique

2019 ◽  
Vol 13 (3) ◽  
pp. 143-149
Author(s):  
Tun Seng Herng ◽  
Shu Ping Lau ◽  
Siu Fung Yu
Keyword(s):  
Vacuum Arc ◽  
Zno Films ◽  
Doped Zno ◽  
Filtered Cathodic Vacuum Arc

Low Temperature Deposition of Zinc Oxide Films

2003 ◽  
Vol 763 ◽  
Author(s):  
H. W. Lee ◽  
Y. G. Wang ◽  
S. P. Lau ◽  
B. K. Tay
Keyword(s):  
Zinc Oxide ◽  
Carrier Concentration ◽  
Vacuum Arc ◽  
Zno Films ◽  
Al Alloy ◽  
Pure Zinc ◽  
Zinc Oxide Films ◽  
Alloy Target ◽  
Temperature Deposition ◽  
Filtered Cathodic Vacuum Arc

AbstractA detailed study of zinc oxide (ZnO) films prepared by filtered cathodic vacuum arc (FCVA) technique was carried out. To deposit the films, a pure zinc target was used and O2 was fed into the chamber. The electrical properties of both undoped and Al-doped ZnO films were studied. For preparing the Al-doped films, a Zn-Al alloy target with 5 wt % Al was used. The resistivity, Hall mobility and carrier concentration of the samples were measured. The lowest resistivity that can be achieved with undoped ZnO films was 3.4×10-3 Ωcm, and that for Al-doped films was 8×10-4 Ωcm. The carrier concentration was found to increase with Al doping.

scholarly journals Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

2003 ◽  
Vol 94 (3) ◽  
pp. 1597-1604 ◽  
Author(s):  
Y. G. Wang ◽  
S. P. Lau ◽  
H. W. Lee ◽  
S. F. Yu ◽  
B. K. Tay ◽  
...  
Keyword(s):  
Room Temperature ◽  
Vacuum Arc ◽  
Zno Films ◽  
Filtered Cathodic Vacuum Arc ◽  
Comprehensive Study

Stablen-channel metal-semiconductor field effect transistors on ZnO films deposited using a filtered cathodic vacuum arc

2012 ◽  
Vol 101 (24) ◽  
pp. 243508 ◽  
Author(s):  
S. Elzwawi ◽  
H-S. Kim ◽  
M. Lynam ◽  
E. L. H. Mayes ◽  
D. G. McCulloch ◽  
...  
Keyword(s):  
Field Effect ◽  
Field Effect Transistors ◽  
Vacuum Arc ◽  
Zno Films ◽  
Filtered Cathodic Vacuum Arc

Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films

2006 ◽  
Vol 515 (3) ◽  
pp. 885-890 ◽  
Author(s):  
V.N. Zhitomirsky ◽  
E. Çetinörgü ◽  
E. Adler ◽  
Yu. Rosenberg ◽  
R.L. Boxman ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Zno Films ◽  
Transparent Conducting ◽  
Vacuum Arc Deposition ◽  
Doped Zno ◽  
Arc Deposition

Optical and ferromagnetic characteristics of Mn doped ZnO thin films grown by filtered cathodic vacuum arc technique

2010 ◽  
Vol 518 (23) ◽  
pp. 7048-7052 ◽  
Author(s):  
H.K. Liang ◽  
S.F. Yu ◽  
S.P. Lau ◽  
T.S. Herng ◽  
S.H. Tsang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Doped Zno ◽  
Filtered Cathodic Vacuum Arc ◽  
Mn Doped
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