Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films

2006 ◽  
Vol 515 (3) ◽  
pp. 885-890 ◽  
Author(s):  
V.N. Zhitomirsky ◽  
E. Çetinörgü ◽  
E. Adler ◽  
Yu. Rosenberg ◽  
R.L. Boxman ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Zno Films ◽  
Transparent Conducting ◽  
Vacuum Arc Deposition ◽  
Doped Zno ◽  
Arc Deposition

scholarly journals Filtered cathodic vacuum arc deposition (FCVAD) technology as method for creation of nanostructured multicomponent modifying coatings for wide application range

Procedia CIRP ◽  
2020 ◽  
Vol 95 ◽  
pp. 999-1003
Author(s):  
Alexey Vereschaka ◽  
Marina Volosova ◽  
Nikolay Sitnikov ◽  
Nikolay Andreev ◽  
Filipp Milovich ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Application Range ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Vacuum arc deposition of thin films from an LaB6 cathode

1996 ◽  
Vol 82 (3) ◽  
pp. 247-253 ◽  
Author(s):  
S. Schmidbauer ◽  
H. Klose ◽  
A. Ehrlich ◽  
M. Friedrich ◽  
M. Röder ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Study of transparent conducting Ga-doped ZnO films grown by reactive co-sputtering of Zn and GaAs

2018 ◽  
Author(s):  
Shravan K. Appani ◽  
Samanth V. Rayapati ◽  
D. S. Sutar ◽  
S. S. Major
Keyword(s):  
Zno Films ◽  
Transparent Conducting ◽  
Doped Zno

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Mechanism of apatite formation on silicon suboxide film prepared by pulsed metal vacuum arc deposition

2008 ◽  
Vol 109 (2-3) ◽  
pp. 342-346 ◽  
Author(s):  
Youtao Xie ◽  
Xuebin Zheng ◽  
Chuanxian Ding ◽  
Xuanyong Liu ◽  
Paul K. Chu
Keyword(s):  
Vacuum Arc ◽  
Apatite Formation ◽  
Silicon Suboxide ◽  
Vacuum Arc Deposition ◽  
Arc Deposition
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