Hydrogen Barrier Layer Against Silicon Oxidation during Atomic Layer Deposition of Al[sub 2]O[sub 3] and HfO[sub 2]

2007 ◽  
Vol 154 (2) ◽  
pp. G44 ◽  
Author(s):  
Martin M. Frank ◽  
Yu Wang ◽  
Ming-Tsung Ho ◽  
Rhett T. Brewer ◽  
Naim Moumen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Silicon Oxidation ◽  
Layer Deposition

Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 ◽  
Vol 81 (15) ◽  
pp. 2824-2826 ◽  
Author(s):  
Anri Nakajima ◽  
Toshirou Kidera ◽  
Hiroyuki Ishii ◽  
Shin Yokoyama
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Promoted photoelectrocatalytic hydrogen evolution of a type II structure via an Al2O3 recombination barrier layer deposited using atomic layer deposition

2017 ◽  
Vol 46 (32) ◽  
pp. 10734-10741 ◽  
Author(s):  
Yajun Wang ◽  
Weikun Bai ◽  
Haiquan Wang ◽  
Yao Jiang ◽  
Shanlei Han ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hydrogen Evolution ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Type Ii ◽  
Layer Deposition

The introduction of an Al2O3 recombination barrier layer at the interface between TiO2 and CdSe can effectively improve the PEC hydrogen evolution performance.

Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer

2012 ◽  
Vol 521 ◽  
pp. 146-149 ◽  
Author(s):  
Dae-Yong Moon ◽  
Dong-Suk Han ◽  
Jae-Hyung Park ◽  
Sae-Young Shin ◽  
Jong-Wan Park ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Atomic layer deposition in nanostructured photovoltaics: tuning optical, electronic and surface properties

Nanoscale ◽  
2015 ◽  
Vol 7 (29) ◽  
pp. 12266-12283 ◽  
Author(s):  
Axel F. Palmstrom ◽  
Pralay K. Santra ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Properties ◽  
Barrier Layer ◽  
Light Absorption ◽  
Atomic Layer ◽  
Third Generation ◽  
Layer Formation ◽  
Layer Deposition ◽  
Third Generation Photovoltaics

This review highlights applications of atomic layer deposition for third generation photovoltaics, including light absorption, barrier layer formation and passivation.

Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 ◽  
Author(s):  
Hiroyuki Ishii ◽  
Toshirou Kidera ◽  
Anri Nakajima ◽  
Shin Yokoyama
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Effects of NH3 plasma pretreatment on initial reactions of atomic layer deposition TaN barrier layer on SiOC dielectric

2007 ◽  
Vol 91 (24) ◽  
pp. 242903 ◽  
Author(s):  
Liang Sun ◽  
Yuan Xue ◽  
Shi-Jin Ding ◽  
Hao-Wen Guo ◽  
David Wei Zhang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Plasma Pretreatment
Sign in / Sign up

Export Citation Format

Share Document