Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer

2012 ◽  
Vol 521 ◽  
pp. 146-149 ◽  
Author(s):  
Dae-Yong Moon ◽  
Dong-Suk Han ◽  
Jae-Hyung Park ◽  
Sae-Young Shin ◽  
Jong-Wan Park ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 ◽  
Vol 81 (15) ◽  
pp. 2824-2826 ◽  
Author(s):  
Anri Nakajima ◽  
Toshirou Kidera ◽  
Hiroyuki Ishii ◽  
Shin Yokoyama
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Promoted photoelectrocatalytic hydrogen evolution of a type II structure via an Al2O3 recombination barrier layer deposited using atomic layer deposition

2017 ◽  
Vol 46 (32) ◽  
pp. 10734-10741 ◽  
Author(s):  
Yajun Wang ◽  
Weikun Bai ◽  
Haiquan Wang ◽  
Yao Jiang ◽  
Shanlei Han ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hydrogen Evolution ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Type Ii ◽  
Layer Deposition

The introduction of an Al2O3 recombination barrier layer at the interface between TiO2 and CdSe can effectively improve the PEC hydrogen evolution performance.

scholarly journals Atomic layer deposition in nanostructured photovoltaics: tuning optical, electronic and surface properties

Nanoscale ◽  
2015 ◽  
Vol 7 (29) ◽  
pp. 12266-12283 ◽  
Author(s):  
Axel F. Palmstrom ◽  
Pralay K. Santra ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Properties ◽  
Barrier Layer ◽  
Light Absorption ◽  
Atomic Layer ◽  
Third Generation ◽  
Layer Formation ◽  
Layer Deposition ◽  
Third Generation Photovoltaics

This review highlights applications of atomic layer deposition for third generation photovoltaics, including light absorption, barrier layer formation and passivation.

Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 ◽  
Author(s):  
Hiroyuki Ishii ◽  
Toshirou Kidera ◽  
Anri Nakajima ◽  
Shin Yokoyama
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Effects of NH3 plasma pretreatment on initial reactions of atomic layer deposition TaN barrier layer on SiOC dielectric

2007 ◽  
Vol 91 (24) ◽  
pp. 242903 ◽  
Author(s):  
Liang Sun ◽  
Yuan Xue ◽  
Shi-Jin Ding ◽  
Hao-Wen Guo ◽  
David Wei Zhang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Plasma Pretreatment

Hydrogen Barrier Layer Against Silicon Oxidation during Atomic Layer Deposition of Al[sub 2]O[sub 3] and HfO[sub 2]

2007 ◽  
Vol 154 (2) ◽  
pp. G44 ◽  
Author(s):  
Martin M. Frank ◽  
Yu Wang ◽  
Ming-Tsung Ho ◽  
Rhett T. Brewer ◽  
Naim Moumen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Silicon Oxidation ◽  
Layer Deposition
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