Oxygen Precipitation of Nitrogen-Doped Czochralski Silicon Subjected to Multi-Step Thermal Process

2019 ◽  
Vol 3 (4) ◽  
pp. 89-96
Author(s):  
Deren Yang ◽  
Qiang Ma ◽  
Xiangyang Ma ◽  
Duanlin Duan
Keyword(s):  
Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Nitrogen-doped Czochralski silicon treated in rapid thermal process

2006 ◽  
Vol 134 (2-3) ◽  
pp. 193-201 ◽  
Author(s):  
Deren Yang ◽  
Ming Li ◽  
Can Cui ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Thermal Process ◽  
Rapid Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon

Effect of iron on oxygen precipitation in nitrogen-doped Czochralski silicon

1998 ◽  
Vol 84 (10) ◽  
pp. 5502-5505 ◽  
Author(s):  
Xiwen Zhang ◽  
Deren Yang ◽  
Ruixin Fan ◽  
Jinxin Zhang ◽  
Duanlin Que
Keyword(s):  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Crystal growth and oxygen precipitation behavior of 300mm nitrogen-doped Czochralski silicon

2006 ◽  
Vol 292 (2) ◽  
pp. 257-259 ◽  
Author(s):  
Daxi Tian ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Liben Li ◽  
Duanlin Que
Keyword(s):  
Crystal Growth ◽  
Precipitation Behavior ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Effect of Rapid Thermal Process on Oxygen Precipitation in Heavily Boron-Doped Czochralski Silicon Wafer

2003 ◽  
Vol 42 (Part 1, No. 12) ◽  
pp. 7290-7291 ◽  
Author(s):  
Chunlong Li ◽  
Xiangyang Ma ◽  
Jin Xu ◽  
Xuegong Yu ◽  
Deren Yang ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Thermal Process ◽  
Rapid Thermal Process ◽  
Czochralski Silicon ◽  
Oxygen Precipitation ◽  
Boron Doped
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