Effect of iron on oxygen precipitation in nitrogen-doped Czochralski silicon

1998 ◽  
Vol 84 (10) ◽  
pp. 5502-5505 ◽  
Author(s):  
Xiwen Zhang ◽  
Deren Yang ◽  
Ruixin Fan ◽  
Jinxin Zhang ◽  
Duanlin Que
Keyword(s):  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Crystal growth and oxygen precipitation behavior of 300mm nitrogen-doped Czochralski silicon

2006 ◽  
Vol 292 (2) ◽  
pp. 257-259 ◽  
Author(s):  
Daxi Tian ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Liben Li ◽  
Duanlin Que
Keyword(s):  
Crystal Growth ◽  
Precipitation Behavior ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Oxygen Precipitation of Nitrogen-Doped Czochralski Silicon Subjected to Multi-Step Thermal Process

2019 ◽  
Vol 3 (4) ◽  
pp. 89-96
Author(s):  
Deren Yang ◽  
Qiang Ma ◽  
Xiangyang Ma ◽  
Duanlin Duan
Keyword(s):  
Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Oxygen precipitation in nitrogen-doped Czochralski silicon

1999 ◽  
Vol 273-274 ◽  
pp. 308-311 ◽  
Author(s):  
Deren Yang ◽  
Xiangyang Ma ◽  
Ruixin Fan ◽  
Jinxin Zhang ◽  
Liben Li ◽  
...  
Keyword(s):  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Nitrogen-doped Czochralski silicon treated in rapid thermal process

2006 ◽  
Vol 134 (2-3) ◽  
pp. 193-201 ◽  
Author(s):  
Deren Yang ◽  
Ming Li ◽  
Can Cui ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Thermal Process ◽  
Rapid Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon
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