A New Lateral Growth Free Formation Technique for Titanium Silicide Using the Si/W/Ti Trilayer Structure
1988 ◽
Vol 135
(9)
◽
pp. 2342-2347
◽
1988 ◽
Vol 135
(10)
◽
pp. 2582-2586
◽
Keyword(s):
1986 ◽
Vol 133
(11)
◽
pp. 2386-2389
◽
1980 ◽
Vol 38
◽
pp. 242-245
Keyword(s):