High Electron and Hole Mobility by Localized Tensile & Compressive Strain Formation Using Ion Implantation and Advanced Annealing of Group IV Materials (Si+C, Si+Ge & Ge+Sn)
2013 ◽
Vol 52
(8S)
◽
pp. 08JN02
◽
Keyword(s):
2006 ◽
Vol 249
(1-2)
◽
pp. 109-113
◽
Keyword(s):
Keyword(s):