Initial Growth Process of TiN Films in Ultrahigh-Vacuum Rapid Thermal Chemical Vapor Deposition

2006 ◽  
Vol 45 (1A) ◽  
pp. 49-53 ◽  
Author(s):  
Yasuyuki Okuda ◽  
Shinya Naito ◽  
Osamu Nakatsuka ◽  
Hiroki Kondo ◽  
Tomoyuki Okuhara ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Growth Process ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Initial Growth ◽  
Tin Films ◽  
Thermal Chemical Vapor Deposition

The Growth of β-SiC on Si and Poly-Si on β-SiC by Rapid Thermal Chemical Vapor Deposition

1997 ◽  
Vol 470 ◽  
Author(s):  
C. W. Liu ◽  
J. C. Sturm
Keyword(s):  
Chemical Vapor Deposition ◽  
Heterojunction Bipolar Transistors ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Buffer Layers ◽  
Initial Growth ◽  
Initial Surface ◽  
Single Crystalline ◽  
Thermal Chemical Vapor Deposition ◽  
Si Films

ABSTRACTThe growth properties of β-SiC on (100) Si grown by rapid thermal chemical vapor deposition, using a single precursor (methylsilane) without an initial surface carbonization step, were investigated. An optimun growth temperature at 800°C was found to grow single crystalline SiC. The single crystalline SiC films were used to be the buffer layers for the growth of subsequent poly Si films. For the poly Si grown at low temperature (625°C), the (110) Si diffraction was found to be the dominant peak in the X-ray diffraction spectra at the initial growth stage, while the poly Si grown on oxide was dominated by (111) texture. A small average misfit (4 %) between (110) Si planes and (100) SiC planes was proposed to explain this effect. To apply the Si/SiC/Si multilayers, SiC/Si heterojunction bipolar transistors (HBT's) were fabricated and compared to Si bipolar junction transistors.

Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition

2009 ◽  
Vol 106 (9) ◽  
pp. 094302 ◽  
Author(s):  
Shingo Kondo ◽  
Shinji Kawai ◽  
Wakana Takeuchi ◽  
Koji Yamakawa ◽  
Shoji Den ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Growth Process ◽  
Chemical Vapor ◽  
Initial Growth ◽  
Carbon Nanowalls
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