Automatic Alignment Technique For X-Ray Lithography Using Moire Signals In Reflection

1986 ◽  
Author(s):  
Yoshiyuki Uchida ◽  
Masato Furukawa ◽  
Kazuhiro Hane ◽  
Shuzo Hattori
Keyword(s):  
X Ray ◽  
Automatic Alignment ◽  
Alignment Technique

Automatic alignment of a Kirkpatrick-Baez active optic by use of a soft-x-ray Hartmann wavefront sensor

2006 ◽  
Vol 31 (2) ◽  
pp. 199 ◽  
Author(s):  
Pascal Mercère ◽  
Mourad Idir ◽  
Thierry Moreno ◽  
Gilles Cauchon ◽  
Guillaume Dovillaire ◽  
...  
Keyword(s):  
Wavefront Sensor ◽  
X Ray ◽  
Automatic Alignment

An automatic alignment technique for multiple rangefinders

2008 ◽  
Author(s):  
Kenta Fujiwara ◽  
Koichiro Yamauchi ◽  
Yukio Sato
Keyword(s):  
Automatic Alignment ◽  
Alignment Technique

A New Mask-To-Wafer Alignment Technique For Synchrotron Radiation X-Ray Lithography

1987 ◽  
Author(s):  
Junji Itoh ◽  
Toshihiko Kanayama ◽  
Nobufumi Atoda ◽  
Koichiro Hoh
Keyword(s):  
Synchrotron Radiation ◽  
X Ray ◽  
Alignment Technique

scholarly journals Automatic alignment and reconstruction of images for soft X-ray tomography

2012 ◽  
Vol 177 (2) ◽  
pp. 259-266 ◽  
Author(s):  
Dilworth Y. Parkinson ◽  
Christian Knoechel ◽  
Chao Yang ◽  
Carolyn A. Larabell ◽  
Mark A. Le Gros
Keyword(s):  
X Ray ◽  
Automatic Alignment

Automatic alignment technique for suspended coil in Joule balance

Metrologia ◽  
2021 ◽  
Author(s):  
Yang Bai ◽  
Dawei Wang ◽  
Zhengkun Li ◽  
Yunfeng Lu ◽  
Pengcheng Hu ◽  
...  
Keyword(s):  
Automatic Alignment ◽  
Alignment Technique

Confocal depth-resolved fluorescence micro-X-ray absorption spectroscopy for the study of cultural heritage materials: a new mobile endstation at the Beijing Synchrotron Radiation Facility

2017 ◽  
Vol 24 (5) ◽  
pp. 1000-1005 ◽  
Author(s):  
Guang Chen ◽  
Shengqi Chu ◽  
Tianxi Sun ◽  
Xuepeng Sun ◽  
Lirong Zheng ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Absorption Spectroscopy ◽  
Incident Beam ◽  
Sample Volume ◽  
X Ray ◽  
Alignment Procedure ◽  
Beijing Synchrotron Radiation Facility ◽  
Automatic Alignment ◽  
Confocal Fluorescence ◽  
X Ray Absorption

A confocal fluorescence endstation for depth-resolved micro-X-ray absorption spectroscopy is described. A polycapillary half-lens defines the incident beam path and a second polycapillary half-lens at 90° defines the probe sample volume. An automatic alignment program based on an evolutionary algorithm is employed to make the alignment procedure efficient. This depth-resolved system was examined on a general X-ray absorption spectroscopy (XAS) beamline at the Beijing Synchrotron Radiation Facility. Sacrificial red glaze (AD 1368–1644) china was studied to show the capability of the instrument. As a mobile endstation to be applied on multiple beamlines, the confocal system can improve the function and flexibility of general XAS beamlines, and extend their capabilities to a wider user community.

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