A dual grating alignment technique for x-ray lithography

1983 ◽  
Vol 1 (4) ◽  
pp. 1276 ◽  
Author(s):  
Hiroo Kinoshita
Keyword(s):  
X Ray ◽  
Alignment Technique

A New Mask-To-Wafer Alignment Technique For Synchrotron Radiation X-Ray Lithography

1987 ◽  
Author(s):  
Junji Itoh ◽  
Toshihiko Kanayama ◽  
Nobufumi Atoda ◽  
Koichiro Hoh
Keyword(s):  
Synchrotron Radiation ◽  
X Ray ◽  
Alignment Technique

Thermal Expansion of Low Dielectric Constant Thin Films by High-Resolution X-Ray Reflectivity

2005 ◽  
Vol 875 ◽  
Author(s):  
Kazuhiko Omote ◽  
Yoshiyasu Ito
Keyword(s):  
Thin Films ◽  
Thermal Expansion ◽  
Incident Angle ◽  
Sample Surface ◽  
X Ray ◽  
Low Dielectric ◽  
Alignment Technique ◽  
Small Change ◽  
Sample Alignment ◽  
Low K

AbstractBy introducing high precision sample alignment technique, repeatability of incident angle to the sample surface for x-ray reflectivity (XRR) measurement is achieved to be within 0.3 arcsec. As a result, film thickness and density are possible to be measured repeatability within 0.03% and density within 0.26%. This accuracy realized to detect very small change of thermal expansion of thin films. The coefficient of thermal expansions (CTE) for porous low-k films deposited by CVD method were measured up to 400°C. The obtained values are in the range from 40 to 80 x10-6 K-1 and they are very large compare to that of copper (16-20 x10-6 K-1).

Automatic Alignment Technique For X-Ray Lithography Using Moire Signals In Reflection

1986 ◽  
Author(s):  
Yoshiyuki Uchida ◽  
Masato Furukawa ◽  
Kazuhiro Hane ◽  
Shuzo Hattori
Keyword(s):  
X Ray ◽  
Automatic Alignment ◽  
Alignment Technique

Precision Alignment Technique For Time-Resolved X-Ray Photography

1988 ◽  
Author(s):  
G. G. Gregory ◽  
P. A. Jaanimagi ◽  
P. W. McKenty ◽  
S. A. Letzring ◽  
M. C. Richardson
Keyword(s):  
Time Resolved ◽  
X Ray ◽  
Alignment Technique

Space and Time Distribution of Hard X-Ray Emission in a Loop at the Beginning of a Flare

1994 ◽  
Vol 144 ◽  
pp. 275-277
Author(s):  
M. Karlický ◽  
J. C. Hénoux
Keyword(s):  
Time Distribution ◽  
Electron Bombardment ◽  
Spatial Evolution ◽  
Superthermal Electrons ◽  
Flare Loop ◽  
X Ray ◽  
Superthermal Electron ◽  
Flare Loops ◽  
Chromospheric Evaporation ◽  
Temporal And Spatial

AbstractUsing a new ID hybrid model of the electron bombardment in flare loops, we study not only the evolution of densities, plasma velocities and temperatures in the loop, but also the temporal and spatial evolution of hard X-ray emission. In the present paper a continuous bombardment by electrons isotropically accelerated at the top of flare loop with a power-law injection distribution function is considered. The computations include the effects of the return-current that reduces significantly the depth of the chromospheric layer which is evaporated. The present modelling is made with superthermal electron parameters corresponding to the classical resistivity regime for an input energy flux of superthermal electrons of 109erg cm−2s−1. It was found that due to the electron bombardment the two chromospheric evaporation waves are generated at both feet of the loop and they propagate up to the top, where they collide and cause temporary density and hard X-ray enhancements.

Some Problems in Understanding the Solar Corona

1994 ◽  
Vol 144 ◽  
pp. 1-9
Author(s):  
A. H. Gabriel
Keyword(s):  
Solar Corona ◽  
Solar Atmosphere ◽  
Theoretical Modelling ◽  
Total System ◽  
Major Advance ◽  
X Ray ◽  
Proper Perspective ◽  
Space Observations

The development of the physics of the solar atmosphere during the last 50 years has been greatly influenced by the increasing capability of observations made from space. Access to images and spectra of the hotter plasma in the UV, XUV and X-ray regions provided a major advance over the few coronal forbidden lines seen in the visible and enabled the cooler chromospheric and photospheric plasma to be seen in its proper perspective, as part of a total system. In this way space observations have stimulated new and important advances, not only in space but also in ground-based observations and theoretical modelling, so that today we find a well-balanced harmony between the three techniques.

White-Light Coronal Structures: Streamers and CMEs

1994 ◽  
Vol 144 ◽  
pp. 82
Author(s):  
E. Hildner
Keyword(s):  
Emission Line ◽  
Electron Density ◽  
White Light ◽  
Coronal Mass Ejections ◽  
X Rays ◽  
Solar Cycles ◽  
Temperature Function ◽  
X Ray ◽  
Eclipse Observations ◽  
Coronal Structures

AbstractOver the last twenty years, orbiting coronagraphs have vastly increased the amount of observational material for the whitelight corona. Spanning almost two solar cycles, and augmented by ground-based K-coronameter, emission-line, and eclipse observations, these data allow us to assess,inter alia: the typical and atypical behavior of the corona; how the corona evolves on time scales from minutes to a decade; and (in some respects) the relation between photospheric, coronal, and interplanetary features. This talk will review recent results on these three topics. A remark or two will attempt to relate the whitelight corona between 1.5 and 6 R⊙to the corona seen at lower altitudes in soft X-rays (e.g., with Yohkoh). The whitelight emission depends only on integrated electron density independent of temperature, whereas the soft X-ray emission depends upon the integral of electron density squared times a temperature function. The properties of coronal mass ejections (CMEs) will be reviewed briefly and their relationships to other solar and interplanetary phenomena will be noted.

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