A reliable higher power ArF laser with advanced functionality for immersion lithography

2012 ◽  
Author(s):  
Akihiko Kurosu ◽  
Masaki Nakano ◽  
Masanori Yashiro ◽  
Masaya Yoshino ◽  
Hiroaki Tsushima ◽  
...  
Keyword(s):  
Immersion Lithography ◽  
Higher Power ◽  
Arf Laser

Next-generation ArF Laser technologies for multiple-patterning immersion lithography supporting leading edge processes

2018 ◽  
Author(s):  
Hirotaka Miyamoto ◽  
Hiroshi Furusato ◽  
Keisuke Ishida ◽  
Hiroaki Tsushima ◽  
Akihiko Kurosu ◽  
...  
Keyword(s):  
Leading Edge ◽  
Next Generation ◽  
Immersion Lithography ◽  
Laser Technologies ◽  
Arf Laser

scholarly journals Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System

IEEE Access ◽  
2017 ◽  
pp. 1-1 ◽  
Author(s):  
Frederick Lie ◽  
Chao-Yi Huang ◽  
Chun-Sheng Wu ◽  
Kao-Tun Chen ◽  
Hung-Fei Kuo
Keyword(s):  
Immersion Lithography ◽  
Arf Laser ◽  
Lithography System

The ArF laser for the next-generation multiple-patterning immersion lithography supporting green operations

2016 ◽  
Author(s):  
Keisuke Ishida ◽  
Takeshi Ohta ◽  
Hirotaka Miyamoto ◽  
Takahito Kumazaki ◽  
Hiroaki Tsushima ◽  
...  
Keyword(s):  
Next Generation ◽  
Immersion Lithography ◽  
Arf Laser

120W ArF laser with high-wavelength stability and efficiency for the next-generation multiple-patterning immersion lithography

2015 ◽  
Author(s):  
Takeshi Ohta ◽  
Keisuke Ishida ◽  
Takahito Kumazaki ◽  
Hiroaki Tsushima ◽  
Akihiko Kurosu ◽  
...  
Keyword(s):  
Next Generation ◽  
Immersion Lithography ◽  
Arf Laser ◽  
High Wavelength

The ArF laser for the next generation multiple-patterning immersion lithography supporting green operations and leading edge processes

2017 ◽  
Author(s):  
Hirotaka Miyamoto ◽  
Takahito Kumazaki ◽  
Hiroaki Tsushima ◽  
Akihiko Kurosu ◽  
Takeshi Ohta ◽  
...  
Keyword(s):  
Leading Edge ◽  
Next Generation ◽  
Immersion Lithography ◽  
Arf Laser

Physical Fitness and Resting EEG in Children With Attention Deficit Hyperactivity Disorder

2015 ◽  
Vol 29 (1) ◽  
pp. 26-32 ◽  
Author(s):  
Ching-Wen Huang ◽  
Chung-Ju Huang ◽  
Chiao-Ling Hung ◽  
Chia-Hao Shih ◽  
Tsung-Min Hung
Keyword(s):  
Attention Deficit Hyperactivity Disorder ◽  
Physical Fitness ◽  
Attention Deficit ◽  
Resting State ◽  
Self Control ◽  
Children With Adhd ◽  
Hyperactivity Disorder ◽  
Higher Power ◽  
Eyes Open ◽  
The Relationship

Children with attention deficit hyperactivity disorder (ADHD) are characterized by a deviant pattern of brain oscillations during resting state, particularly elevated theta power and increased theta/alpha and theta/beta ratios that are related to cognitive functioning. Physical fitness has been found beneficial to cognitive performance in a wide age population. The purpose of the present study was to investigate the relationship between physical fitness and resting-state electroencephalographic (EEG) oscillations in children with ADHD. EEG was recorded during eyes-open resting for 28 children (23 boys and 5 girls, 8.66 ± 1.10 years) with ADHD, and a battery of physical fitness assessments including flexibility, muscular endurance, power, and agility tests were administered. The results indicated that ADHD children with higher power fitness exhibited a smaller theta/alpha ratio than those with lower power fitness. These findings suggest that power fitness may be associated with improved attentional self-control in children with ADHD.

Amplification of fibre Bragg grating reflectivity by post-writing exposure with a 193 nm ArF laser

1994 ◽  
Vol 30 (14) ◽  
pp. 1133-1134 ◽  
Author(s):  
P. E. Dyer ◽  
K. C. Byron ◽  
R. J. Farley ◽  
R. Giedl
Keyword(s):  
Bragg Grating ◽  
Fibre Bragg Grating ◽  
Arf Laser ◽  
193 Nm
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