Full-field step profile measurement with sinusoidal wavelength scanning interferometer

2014 ◽  
Author(s):  
Samuel Choi ◽  
Osami Sasaki ◽  
Takamasa Suzuki
Keyword(s):  
Profile Measurement ◽  
Full Field ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces

2012 ◽  
Author(s):  
Osami Sasaki ◽  
Takahiro Kurashige ◽  
Samuel Choi ◽  
Takamasa Suzuki
Keyword(s):  
Metal Surfaces ◽  
Profile Measurement ◽  
Wavelength Scanning ◽  
Scanning Interferometer

Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

2008 ◽  
Vol 46 (2) ◽  
pp. 179-184 ◽  
Author(s):  
Young-Min Hwang ◽  
Sung-Won Yoon ◽  
Jung-Hwan Kim ◽  
Souk Kim ◽  
Heui-Jae Pahk
Keyword(s):  
Thin Film ◽  
Wavelet Transform ◽  
Film Thickness ◽  
Profile Measurement ◽  
Thin Film Thickness ◽  
Thickness Profile ◽  
Wavelength Scanning
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