Experimental characterization of constituent errors in electron-beam lithography

2006 ◽  
Author(s):  
Russell Cinque ◽  
Peter Buck ◽  
Kyungsoo S. Yeo ◽  
Tadashi Komagata ◽  
Yasutoshi Nakagawa
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Experimental Characterization

Characterization of High Resolution Resists and Metal Shims by Scanning Probe Microscopy

2000 ◽  
Vol 6 (2) ◽  
pp. 129-136 ◽  
Author(s):  
B. A. Sexton ◽  
R. J. Marnock
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Scanning Probe Microscopy ◽  
Electron Beam Lithography ◽  
Scanning Probe ◽  
Feedback Process ◽  
Probe Microscope ◽  
Etched Silicon ◽  
Micro Patterns

Technologies such as compact disc (CD) manufacturing, hologram embossing, and security printing rely on the reproduction of micro-patterns generated on surfaces by optical or electron-beam lithographic writing onto electron-beam or photoresists. The periodicity of such patterns varies from sub-micron to several microns, with depths up to 0.5 μm. The scanning probe microscope (SPM) is becoming a routine tool for analysis of these micro-patterns, to check on depths and lateral dimensions of features. Direct scanning of resist-covered plates is now possible, without damage, using resonant low-contact force SPM with etched silicon cantilevers. Metal shims produced from the master resist plates can also be scanned and checked for defects prior to production of embossed foils. The present article discusses examples of the use of a Digital Instruments 3100 microscope in analysis of production electron-beam lithography plates with a 0.5 μm resist thickness. We also examine features of nickel replicas (father and mother shims) produced by electroforming from the original plate. With SPM measurements of the development profile of a particular plate, corrections can be made to exposures and development times during production to correct errors. An example is given of such a feedback process.

scholarly journals Experimental Characterization of Electron Beam Welded SAE 5137H Thick Steel Plate

2017 ◽  
Vol 229 ◽  
pp. 012028
Author(s):  
Prakash Kattire ◽  
Valmik Bhawar ◽  
Sandeep Thakare ◽  
Sachin Patil ◽  
Santosh Mane ◽  
...  
Keyword(s):  
Electron Beam ◽  
Steel Plate ◽  
Experimental Characterization ◽  
Thick Steel
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