Novel Approach to Synthesize Nanostructured Gallium Oxide for Devices Operating in Harsh Environmental Conditions

The importance of Ga2O3-based material for harsh environmental applications has attracted the interest of researchers in exploring various fabrication and growth techniques of Ga2O3-based nanomaterials using effective and low-cost processes. Herein, a demonstration to improve the wettability of liquid gallium on a rough silicon surface is presented. To control the roughness process, the silicon surface was patterned and groove-shape structures on the silicon were created using a photoelectrochemical (PEC) etching technique. Gallium oxide nanostructures were grown by thermal oxidation from liquid Ga in the presence and the absence of a silver thin film used as a catalyst. Scanning Electron Microscopy (SEM) was used to observe the morphology of the nanostructures grown on the roughed surface of the silicon substrate. The conformal deposition of Ga2O3 nanostructures inside the grooves of the PEC etched silicon surface was observed. The presence of Ag catalyst was found to completely change the morphology of Ga2O3. This method is recommended for the sustainable and low-cost synthesis of nanostructured gallium oxide for applications, including gas sensing.

Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of DTI structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PDMS micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

In this paper, we report a novel teeter-totter type accelerometer based on glass-silicon composite wafers. Unlike the ordinary micro-electro-mechanical systems (MEMS) accelerometers, the entire structure of the accelerometer, includes the mass, the springs, and the composite wafer. The composite wafer is expected to serve as the electrical feedthrough and the fixed capacitance plate at the same time, to simplify the fabrication process, and to save on chip area. It is manufactured by filling melted borosilicate glass into an etched silicon wafer and polishing the wafer flat. A sensitivity of 51.622 mV/g in the range of ±5 g (g = 9.8 m/s2), a zero-bias stability under 0.2 mg, and the noise floor with 11.28 µg/√Hz were obtained, which meet the needs of most acceleration detecting applications. The micromachining solution is beneficial for vertical interconnection and miniaturization of MEMS devices.

Development of a novel microfluidic device to study metal geochemistry in situ using X-ray fluorescence microprobe spectroscopy

The study of in situ microscale biogeochemical processes represents a major challenge in the environmental sciences. The combination of microfluidic devices with X-ray fluorescence microprobe spectroscopy may address this need, but typical materials used in these devices attenuate the X-rays needed to analyze key elements of interest, such as Fe or As. In this work, a method is presented for fabricating an etched silicon microfluidic device that is sealed with a 30 µm thin glass window that is sufficiently transparent for X-ray fluorescence microprobe spectroscopy. The capabilities of these devices for X-ray microprobe spectroscopy are demonstrated using an Fe (hydr)oxide solid that is loaded with As and then infused with sulfide, on beamline 4-BM at NSLS-II, resulting in time-variant Fe precipitation reactions and As sorption. Key results include in situ X-ray fluorescence time-series maps of Fe, As and a Br flow tracer, as well as spot XANES at both the Fe K edge and As K edge. Additionally, multiple energy mapping is used to examine the spatial speciation of As over time. The results of this work clearly demonstrate the capabilities of this novel microfluidic system that can be analyzed using X-ray fluorescence microprobe spectroscopy and can be made to study a wide range of complex microscale geochemical systems.