Efficient approach for experimental characterization of resist profile in electron-beam-exposed resists

1992 ◽  
Author(s):  
Nikolina A. Madjarova
Keyword(s):  
Electron Beam ◽  
Experimental Characterization ◽  
Efficient Approach

scholarly journals Experimental Characterization of Electron Beam Welded SAE 5137H Thick Steel Plate

2017 ◽  
Vol 229 ◽  
pp. 012028
Author(s):  
Prakash Kattire ◽  
Valmik Bhawar ◽  
Sandeep Thakare ◽  
Sachin Patil ◽  
Santosh Mane ◽  
...  
Keyword(s):  
Electron Beam ◽  
Steel Plate ◽  
Experimental Characterization ◽  
Thick Steel

Experimental characterization of constituent errors in electron-beam lithography

2006 ◽  
Author(s):  
Russell Cinque ◽  
Peter Buck ◽  
Kyungsoo S. Yeo ◽  
Tadashi Komagata ◽  
Yasutoshi Nakagawa
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Experimental Characterization

A very rapid in situ Kikuchi technique to determine relative crystal misorientation

1988 ◽  
Vol 46 ◽  
pp. 830-831
Author(s):  
J. I. Bennetch
Keyword(s):  
Electron Beam ◽  
Analytical Techniques ◽  
Superplastic Forming ◽  
The Other ◽  
Kikuchi Pattern ◽  
Kikuchi Line ◽  
Line Analysis

In a recent study of the superplastic forming (SPF) behavior of certain Al-Li-X alloys, the relative misorientation between adjacent (sub)grains proved to be an important parameter. It is well established that the most accurate way to determine misorientation across boundaries is by Kikuchi line analysis. However, the SPF study required the characterization of a large number of (sub)grains in each sample to be statistically meaningful, a very time-consuming task even for comparatively rapid Kikuchi analytical techniques.In order to circumvent this problem, an alternate, even more rapid in-situ Kikuchi technique was devised, eliminating the need for the developing of negatives and any subsequent measurements on photographic plates. All that is required is a double tilt low backlash goniometer capable of tilting ± 45° in one axis and ± 30° in the other axis. The procedure is as follows. While viewing the microscope screen, one merely tilts the specimen until a standard recognizable reference Kikuchi pattern is centered, making sure, at the same time, that the focused electron beam remains on the (sub)grain in question.

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