Structure and properties of diamond-like carbon coatings on large area infrared elements

2006 ◽  
Author(s):  
Qiantao Li ◽  
Changxin Xiong ◽  
Mi Zhu
Keyword(s):  
Diamond Like Carbon ◽  
Structure And Properties ◽  
Large Area ◽  
Carbon Coatings

Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

1995 ◽  
Vol 396 ◽  
Author(s):  
Costas G. Fountzoulas
Keyword(s):  
Standard Deviation ◽  
Sliding Friction ◽  
Ion Beam ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Large Area ◽  
Carbon Coatings ◽  
Ion Beam Assisted Deposition ◽  
Deposition Parameters ◽  
Set Up

AbstractHard, low-friction silicon-containing diamond-like carbon coatings (Si-DLC), were formed by Ar+ ion beam assisted deposition (IBAD), on 5 in. diameter silicon wafers. The diffusion pump oil precursor (tetraphenyl-tetramethyl-trisiloxane: (C6H5)4(CH3)4Si3O2) was evaporated through seven, 3 mm diameter, closely packed apertures (multinozzle/multi-aperture container) arranged in a hexagonal pattern, approximately 5 mm apart according to mathematical model [1[ developed at ARL describing the spatial distribution of film deposition from nozzles and apertures onto inclined substrates.The ion energy was kept at 40 keV whereas the ion current density and the oil evaporation temperature were varied to produce hard, lubricious and adherent films. The multinozzle array allowed the relatively uniform (± 20%) coverage of the entire 5 in. substrate. The thickness and the microhardness of the films were measured along the rectilinear surface coordinates of the substrate area. Depending on the deposition parameters the standard deviation of the coating thicknesses and Knoop micro-hardness varied from 14 to 30 percent respectively over the substrate. This is a significant improvement from the previously used single nozzle set up where the standard deviation of the coating thickness was 50 to 100 percent for 2 in. diameter substrates. The Knoop microhardness and the sliding friction coefficient of these coatings ranged from 10,000 to 20,000 MPa and 0.04 to 0.2 respectively. These values are in agreement with our previously reported single nozzle results [2].

On the adhesion of diamond‐like carbon coatings deposited by low‐pressure plasma on 316L stainless steel

2021 ◽  
Author(s):  
Gabriel Morand ◽  
Pascale Chevallier ◽  
Linda Bonilla‐Gameros ◽  
Stéphane Turgeon ◽  
Maxime Cloutier ◽  
...  
Keyword(s):  
Stainless Steel ◽  
316L Stainless Steel ◽  
Low Pressure ◽  
Diamond Like Carbon ◽  
Carbon Coatings ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Large Area Surface Treatment by Ion Beam Technology

1996 ◽  
Vol 438 ◽  
Author(s):  
R. L. C. Wu ◽  
W. Lanter
Keyword(s):  
Ion Beam ◽  
High Vacuum ◽  
Polycrystalline Diamond ◽  
Carbon Films ◽  
Ultra High Vacuum ◽  
Diamond Like Carbon ◽  
Chemical Compositions ◽  
Rf Power ◽  
Large Area ◽  
Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

Diamond and Diamond Like Carbon Coatings

1994 ◽  
Vol 72 (3) ◽  
pp. 120-123 ◽  
Author(s):  
I.R. McColl ◽  
J.V. Wood ◽  
D.M. Grant
Keyword(s):  
Diamond Like Carbon ◽  
Carbon Coatings
Sign in / Sign up

Export Citation Format

Share Document